Particle-in-cell simulation of ion energy distributions on an electrode by applying tailored bias waveforms in the afterglow of a pulsed plasma

2011 ◽  
Vol 109 (8) ◽  
pp. 083302 ◽  
Author(s):  
Paola Diomede ◽  
Demetre J. Economou ◽  
Vincent M. Donnelly
Keyword(s):  
Pulsed Plasma ◽  
Energy Distributions ◽  
Ion Energy ◽  
Particle In Cell ◽  
Cell Simulation ◽  
Ion Energy Distributions

Control of ion energy distributions using a pulsed plasma with synchronous bias on a boundary electrode

2011 ◽  
Vol 20 (5) ◽  
pp. 055001 ◽  
Author(s):  
Hyungjoo Shin ◽  
Weiye Zhu ◽  
Lin Xu ◽  
Vincent M Donnelly ◽  
Demetre J Economou
Keyword(s):  
Pulsed Plasma ◽  
Energy Distributions ◽  
Ion Energy ◽  
Ion Energy Distributions

Ion energy distributions in a pulsed plasma doping system

2005 ◽  
Vol 98 (11) ◽  
pp. 113307 ◽  
Author(s):  
S. Radovanov ◽  
L. Godet ◽  
R. Dorai ◽  
Z. Fang ◽  
B. W. Koo ◽  
...  
Keyword(s):  
Pulsed Plasma ◽  
Energy Distributions ◽  
Ion Energy ◽  
Plasma Doping ◽  
Ion Energy Distributions

Ion energy distributions in rf sheaths; review, analysis and simulation

1999 ◽  
Vol 8 (3) ◽  
pp. R45-R64 ◽  
Author(s):  
E Kawamura ◽  
V Vahedi ◽  
M A Lieberman ◽  
C K Birdsall
Keyword(s):  
Energy Distributions ◽  
Ion Energy ◽  
Review Analysis ◽  
Ion Energy Distributions
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