Ion energy distributions in a pulsed plasma doping system

2005 ◽  
Vol 98 (11) ◽  
pp. 113307 ◽  
Author(s):  
S. Radovanov ◽  
L. Godet ◽  
R. Dorai ◽  
Z. Fang ◽  
B. W. Koo ◽  
...  
Keyword(s):  
Pulsed Plasma ◽  
Energy Distributions ◽  
Ion Energy ◽  
Plasma Doping ◽  
Ion Energy Distributions

Ion energy distributions measured inside a high-voltage cathode in a BF3pulsed dc plasma used for plasma doping: experiments andab initiocalculations

2012 ◽  
Vol 21 (6) ◽  
pp. 065006 ◽  
Author(s):  
Ludovic Godet ◽  
Svetlana Radovanov ◽  
Jay Sheuer ◽  
Christophe Cardinaud ◽  
Nicolas Fernandez ◽  
...  
Keyword(s):  
High Voltage ◽  
Energy Distributions ◽  
Dc Plasma ◽  
Ion Energy ◽  
Plasma Doping ◽  
Ion Energy Distributions

Control of ion energy distributions using a pulsed plasma with synchronous bias on a boundary electrode

2011 ◽  
Vol 20 (5) ◽  
pp. 055001 ◽  
Author(s):  
Hyungjoo Shin ◽  
Weiye Zhu ◽  
Lin Xu ◽  
Vincent M Donnelly ◽  
Demetre J Economou
Keyword(s):  
Pulsed Plasma ◽  
Energy Distributions ◽  
Ion Energy ◽  
Ion Energy Distributions
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