On the applicability of self-consistent global model for the characterization of Cl2/Ar inductively coupled plasma
2007 ◽
Vol 84
(1)
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pp. 136-143
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2015 ◽
Vol 24
(2)
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pp. 025035
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Keyword(s):
Keyword(s):
2014 ◽
Vol 29
(6)
◽
pp. 1132-1137
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