Low‐dose implantation of Sb in Si1−xGexepitaxial layers: Correlation between electrical properties and radiation damage
1980 ◽
Vol 38
◽
pp. 230-231
2018 ◽
Vol 72
(5)
◽
pp. 561-569
◽
1998 ◽
Vol 258-263
◽
pp. 1414-1419
◽