Low-temperature synthesis of large-area graphene-based transparent conductive films using surface wave plasma chemical vapor deposition

Jaeho Kim; Masatou Ishihara; Yoshinori Koga; Kazuo Tsugawa; Masataka Hasegawa; Sumio Iijima

doi:10.1063/1.3561747

Low-temperature synthesis of large-area graphene-based transparent conductive films using surface wave plasma chemical vapor deposition

Applied Physics Letters ◽

10.1063/1.3561747 ◽

2011 ◽

Vol 98 (9) ◽

pp. 091502 ◽

Cited By ~ 168

Author(s):

Jaeho Kim ◽

Masatou Ishihara ◽

Yoshinori Koga ◽

Kazuo Tsugawa ◽

Masataka Hasegawa ◽

...

Keyword(s):

Surface Wave ◽

Low Temperature ◽

Vapor Deposition ◽

Chemical Vapor ◽

Large Area ◽

Plasma Chemical ◽

Low Temperature Synthesis ◽

Temperature Synthesis ◽

Plasma Chemical Vapor Deposition ◽

Conductive Films

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Low-Temperature Synthesis of Diamond Films in Thermoassisted RF Plasma Chemical Vapor Deposition

Japanese Journal of Applied Physics ◽

10.1143/jjap.31.1428 ◽

1992 ◽

Vol 31 (Part 1, No. 5A) ◽

pp. 1428-1431 ◽

Cited By ~ 13

Author(s):

Ichiro Watanabe ◽

Takashi Matsushita ◽

Koujyu Sasahara

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Vapor Deposition ◽

Diamond Films ◽

Chemical Vapor ◽

Rf Plasma ◽

Plasma Chemical ◽

Low Temperature Synthesis ◽

Temperature Synthesis ◽

Plasma Chemical Vapor Deposition

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Low Temperature Synthesis of Diamond Films in Thermoassisted RF Plasma Chemical Vapor Deposition. II

Japanese Journal of Applied Physics ◽

10.1143/jjap.36.792 ◽

1997 ◽

Vol 36 (Part 1, No. 2) ◽

pp. 792-797

Author(s):

Ichiro Watanabe ◽

Koushin Yoshie

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Vapor Deposition ◽

Diamond Films ◽

Chemical Vapor ◽

Rf Plasma ◽

Plasma Chemical ◽

Low Temperature Synthesis ◽

Temperature Synthesis ◽

Plasma Chemical Vapor Deposition

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Low-temperature synthesis of graphene on Fe2O3 using inductively coupled plasma chemical vapor deposition

Materials Letters ◽

10.1016/j.matlet.2012.11.031 ◽

2013 ◽

Vol 92 ◽

pp. 437-439 ◽

Cited By ~ 13

Author(s):

Lam Van Nang ◽

Eui-Tae Kim

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Vapor Deposition ◽

Inductively Coupled Plasma ◽

Chemical Vapor ◽

Plasma Chemical ◽

Low Temperature Synthesis ◽

Temperature Synthesis ◽

Plasma Chemical Vapor Deposition ◽

Inductively Coupled

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Low Temperature Synthesis of Aligned Carbon Nanotubes by Direct Current Plasma Chemical Vapor Deposition

Shinku ◽

10.3131/jvsj.48.193 ◽

2005 ◽

Vol 48 (3) ◽

pp. 193-195 ◽

Cited By ~ 1

Author(s):

Yosuke WATANABE ◽

Yasuaki HAYASHI ◽

Shigehiro NISHINO

Keyword(s):

Carbon Nanotubes ◽

Low Temperature ◽

Vapor Deposition ◽

Chemical Vapor ◽

Plasma Chemical ◽

Low Temperature Synthesis ◽

Temperature Synthesis ◽

Plasma Chemical Vapor Deposition ◽

Direct Current Plasma ◽

Aligned Carbon Nanotubes

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Low-Temperature Synthesis of Aligned Carbon Nanofibers on Glass Substrates by Inductively Coupled Plasma Chemical Vapor Deposition

Japanese Journal of Applied Physics ◽

10.1143/jjap.45.5326 ◽

2006 ◽

Vol 45 (6A) ◽

pp. 5326-5328 ◽

Cited By ~ 3

Author(s):

Shin-ichi Honda ◽

Kuei-Yi Lee ◽

Katsunori Aoki ◽

Takashi Hirao ◽

Kenjiro Oura ◽

...

Keyword(s):

Low Temperature ◽

Vapor Deposition ◽

Inductively Coupled Plasma ◽

Chemical Vapor ◽

Plasma Chemical ◽

Low Temperature Synthesis ◽

Temperature Synthesis ◽

Plasma Chemical Vapor Deposition ◽

Inductively Coupled ◽

Glass Substrates

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Low-Temperature Synthesis Multiwalled Carbon Nanotubes by Microwave Plasma Chemical Vapor Deposition Using CH4–CO2Gas Mixture

Japanese Journal of Applied Physics ◽

10.1143/jjap.42.614 ◽

2003 ◽

Vol 42 (Part 1, No. 2A) ◽

pp. 614-619 ◽

Cited By ~ 29

Author(s):

Mi Chen ◽

Chieng-Ming Chen ◽

Shin-Chen Shi ◽

Chia-Fu Chen

Keyword(s):

Carbon Nanotubes ◽

Low Temperature ◽

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Plasma Chemical ◽

Low Temperature Synthesis ◽

Temperature Synthesis ◽

Multiwalled Carbon ◽

Plasma Chemical Vapor Deposition

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Low-temperature synthesis of graphene on nickel foil by microwave plasma chemical vapor deposition

Applied Physics Letters ◽

10.1063/1.3605560 ◽

2011 ◽

Vol 98 (26) ◽

pp. 263106 ◽

Cited By ~ 105

Author(s):

Y. Kim ◽

W. Song ◽

S. Y. Lee ◽

C. Jeon ◽

W. Jung ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Nickel Foil ◽

Plasma Chemical ◽

Low Temperature Synthesis ◽

Temperature Synthesis ◽

Plasma Chemical Vapor Deposition

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The Effect of Substrate on the Low-Temperature Carbon Nanomaterials Growth by Microwave Excited Surface-wave Plasma Chemical Vapor Deposition

Journal of Physics Conference Series ◽

10.1088/1742-6596/417/1/012042 ◽

2013 ◽

Vol 417 ◽

pp. 012042 ◽

Cited By ~ 2

Author(s):

R V Bekarevich ◽

S Miura ◽

A Ogino ◽

A U Rahachou ◽

M Nagatsu

Keyword(s):

Chemical Vapor Deposition ◽

Surface Wave ◽

Low Temperature ◽

Vapor Deposition ◽

Carbon Nanomaterials ◽

Chemical Vapor ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition

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Low Temperature Synthesis of Aligned Carbon Nanotubes by Inductively Coupled Plasma Chemical Vapor Deposition Using Pure Methane

Japanese Journal of Applied Physics ◽

10.1143/jjap.42.l441 ◽

2003 ◽

Vol 42 (Part 2, No. 4B) ◽

pp. L441-L443 ◽

Cited By ~ 22

Author(s):

Shin-ichi Honda ◽

Mitsuhiro Katayama ◽

Kuei-Yi Lee ◽

Takashi Ikuno ◽

Shigeharu Ohkura ◽

...

Keyword(s):

Vapor Deposition ◽

Inductively Coupled Plasma ◽

Chemical Vapor ◽

Plasma Chemical ◽

Low Temperature Synthesis ◽

Temperature Synthesis ◽

Plasma Chemical Vapor Deposition ◽

Inductively Coupled ◽

Aligned Carbon Nanotubes ◽

Pure Methane

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Catalyst-Free Growth of Graphene by Microwave Surface Wave Plasma Chemical Vapor Deposition at Low Temperature

Journal of Materials Science and Chemical Engineering ◽

10.4236/msce.2016.43002 ◽

2016 ◽

Vol 04 (03) ◽

pp. 10-14 ◽

Cited By ~ 1

Author(s):

Sudip Adhikari ◽

Hare Ram Aryal ◽

Hideo Uchida ◽

Masayoshi Umeno

Keyword(s):

Chemical Vapor Deposition ◽

Surface Wave ◽

Low Temperature ◽

Vapor Deposition ◽

Chemical Vapor ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition ◽

Catalyst Free ◽

Free Growth

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