Nanometer thick Si/SiGe strained‐layer superlattices grown by an ultrahigh vacuum/chemical vapor deposition technique

T. C. Chang; C. Y. Chang; T. G. Jung; W. C. Tsai; P. J. Wang; T. L. Lee; L. J. Chen

doi:10.1063/1.356104

Nanometer thick Si/SiGe strained‐layer superlattices grown by an ultrahigh vacuum/chemical vapor deposition technique

Journal of Applied Physics ◽

10.1063/1.356104 ◽

1994 ◽

Vol 75 (7) ◽

pp. 3441-3445 ◽

Cited By ~ 5

Author(s):

T. C. Chang ◽

C. Y. Chang ◽

T. G. Jung ◽

W. C. Tsai ◽

P. J. Wang ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Ultrahigh Vacuum ◽

Chemical Vapor ◽

Deposition Technique ◽

Strained Layer ◽

Chemical Vapor Deposition Technique ◽

Vapor Deposition Technique ◽

Strained Layer Superlattices

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Characterization of Si/SiGe Strained-Layer Superlattices Grown by an Ultrahigh Vacuum/Chemical Vapor Deposition Technique

Japanese Journal of Applied Physics ◽

10.1143/jjap.33.1787 ◽

1994 ◽

Vol 33 (Part 1, No. 4A) ◽

pp. 1787-1792 ◽

Cited By ~ 4

Author(s):

Ting-Chang Chang ◽

Chun-Yen Chang ◽

Tz-Guei Jung ◽

Wen-Chung Tsai ◽

Guo-Wei Huang ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Ultrahigh Vacuum ◽

Chemical Vapor ◽

Deposition Technique ◽

Strained Layer ◽

Chemical Vapor Deposition Technique ◽

Vapor Deposition Technique ◽

Strained Layer Superlattices

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Characterization of Si/SiGe strained‐layer superlattices grown by ultrahigh vacuum/chemical vapor deposition technique

Applied Physics Letters ◽

10.1063/1.105352 ◽

1991 ◽

Vol 59 (7) ◽

pp. 814-816 ◽

Cited By ~ 26

Author(s):

P. J. Wang ◽

M. S. Goorsky ◽

B. S. Meyerson ◽

F. K. LeGoues ◽

M. J. Tejwani

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Ultrahigh Vacuum ◽

Chemical Vapor ◽

Deposition Technique ◽

Strained Layer ◽

Chemical Vapor Deposition Technique ◽

Vapor Deposition Technique ◽

Strained Layer Superlattices

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Quantum confinement effects of Si/SiGe strained-layer superlattices grown by an ultrahigh vacuum/chemical vapor deposition technique

Journal of Materials Science Materials in Electronics ◽

10.1007/bf00215576 ◽

1994 ◽

Vol 5 (6) ◽

pp. 370-374 ◽

Cited By ~ 1

Author(s):

T.C. Chang ◽

C.Y. Chang ◽

T.G. Jung ◽

P.A. Chen ◽

W.C. Tsai ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Quantum Confinement ◽

Ultrahigh Vacuum ◽

Chemical Vapor ◽

Deposition Technique ◽

Confinement Effects ◽

Quantum Confinement Effects ◽

Vapor Deposition Technique ◽

Strained Layer Superlattices

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RETRACTED: Synthesis of carbon nanotubes using the cobalt nanocatalyst by thermal chemical vapor deposition technique

Journal of Alloys and Compounds ◽

10.1016/j.jallcom.2015.07.063 ◽

2015 ◽

Vol 648 ◽

pp. 1104-1108 ◽

Cited By ~ 14

Author(s):

S.S. Madani ◽

K. Zare ◽

M. Ghoranneviss ◽

A. Salar Elahi

Keyword(s):

Carbon Nanotubes ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Technique ◽

Thermal Chemical Vapor Deposition ◽

Chemical Vapor Deposition Technique ◽

Vapor Deposition Technique ◽

Synthesis Of Carbon Nanotubes

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Investigation of polycrystalline silicon grain structure with single wafer chemical vapor deposition technique

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.1355364 ◽

2001 ◽

Vol 19 (4) ◽

pp. 1898-1901 ◽

Cited By ~ 3

Author(s):

H. Bu ◽

C. Hu ◽

M. Bevan ◽

S. Wang ◽

E. Sanchez ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Polycrystalline Silicon ◽

Chemical Vapor ◽

Grain Structure ◽

Deposition Technique ◽

Chemical Vapor Deposition Technique ◽

Vapor Deposition Technique

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Fabrication of aluminum oxide thin films by a low‐pressure metalorganic chemical vapor deposition technique

Applied Physics Letters ◽

10.1063/1.108838 ◽

1993 ◽

Vol 62 (7) ◽

pp. 681-683 ◽

Cited By ~ 34

Author(s):

J. S. Kim ◽

H. A. Marzouk ◽

P. J. Reucroft ◽

J. D. Robertson ◽

C. E. Hamrin

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Aluminum Oxide ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Deposition Technique ◽

Chemical Vapor Deposition Technique ◽

Vapor Deposition Technique ◽

Metalorganic Chemical

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Taguchi Method Optimization of Parameters for Growth of Nano Dimensional SiC Wires by Chemical Vapor Deposition Technique

Current Nanoscience ◽

10.2174/1573413711208010161 ◽

2012 ◽

Vol 8 (1) ◽

pp. 161-169 ◽

Cited By ~ 11

Author(s):

Jyoti Prakash ◽

Sunil K. Ghosh ◽

D. Sathiyamoorthy ◽

R. Venugopalan ◽

B. Paul

Keyword(s):

Chemical Vapor Deposition ◽

Taguchi Method ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Technique ◽

Optimization Of Parameters ◽

Chemical Vapor Deposition Technique ◽

Vapor Deposition Technique ◽

Method Optimization

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Synthesis and Electrical Properties of (Bi1/2Na1/2)TiO3(BNT) Ferroelectric Thin Films by Liquid Sprayed Mist Chemical Vapor Deposition Technique

Journal of Nanoscience and Nanotechnology ◽

10.1166/jnn.2006.038 ◽

2006 ◽

Vol 6 (11) ◽

pp. 3479-3482

Author(s):

Bok-Hee Kim ◽

Sang-Hee Kim ◽

Jong-Hwan Kim ◽

Kun-Jae Lee ◽

Yong-Ho Choa ◽

...

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Electrical Properties ◽

Vapor Deposition ◽

Chemical Vapor ◽

Ferroelectric Thin Films ◽

Deposition Technique ◽

Chemical Vapor Deposition Technique ◽

Vapor Deposition Technique

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Epitaxial growth of Ge on 〈100〉 Si by a simple chemical vapor deposition technique

Applied Physics Letters ◽

10.1063/1.92695 ◽

1981 ◽

Vol 39 (3) ◽

pp. 245-247 ◽

Cited By ~ 55

Author(s):

T. F. Kuech ◽

M. Mäenpää ◽

S. S. Lau

Keyword(s):

Chemical Vapor Deposition ◽

Epitaxial Growth ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Technique ◽

Chemical Vapor Deposition Technique ◽

Vapor Deposition Technique ◽

Simple Chemical

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Au/nc-Si:H core–shell nanostructures prepared by hot wire assisted plasma enhanced chemical vapor deposition technique

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2012.04.077 ◽

2013 ◽

Vol 231 ◽

pp. 394-398 ◽

Cited By ~ 4

Author(s):

Kee Wah Chan ◽

Boon Tong Goh ◽

Saadah Abdul Rahman ◽

Zarina Aspanut

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Core Shell ◽

Hot Wire ◽

Deposition Technique ◽

Chemical Vapor Deposition Technique ◽

Shell Nanostructures ◽

Vapor Deposition Technique

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