Improved hydrogen ionization rate in enhanced glow discharge plasma immersion ion implantation by enlarging the interaction path using an insulating tube

2011 ◽  
Vol 82 (2) ◽  
pp. 023503 ◽  
Author(s):  
Zhuo Wang ◽  
Ying Zhu ◽  
Liu He Li ◽  
Qiu Yuan Lu ◽  
Fu Shun He ◽  
...  
Keyword(s):  
Glow Discharge ◽  
Ion Implantation ◽  
Discharge Plasma ◽  
Ionization Rate ◽  
Glow Discharge Plasma ◽  
Hydrogen Ionization ◽  
Plasma Immersion Ion Implantation

Impact energy and retained dose uniformity in enhanced glow discharge plasma immersion ion implantation

2009 ◽  
Vol 95 (6) ◽  
pp. 061503 ◽  
Author(s):  
Qiu Yuan Lu ◽  
Liu He Li ◽  
Jian Hui Li ◽  
Ricky K. Y. Fu ◽  
Paul K. Chu
Keyword(s):  
Glow Discharge ◽  
Ion Implantation ◽  
Impact Energy ◽  
Discharge Plasma ◽  
Glow Discharge Plasma ◽  
Dose Uniformity ◽  
Plasma Immersion Ion Implantation
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