Impact energy and retained dose uniformity in enhanced glow discharge plasma immersion ion implantation

Qiu Yuan Lu; Liu He Li; Jian Hui Li; Ricky K. Y. Fu; Paul K. Chu

doi:10.1063/1.3204697

Impact energy and retained dose uniformity in enhanced glow discharge plasma immersion ion implantation

Applied Physics Letters ◽

10.1063/1.3204697 ◽

2009 ◽

Vol 95 (6) ◽

pp. 061503 ◽

Cited By ~ 7

Author(s):

Qiu Yuan Lu ◽

Liu He Li ◽

Jian Hui Li ◽

Ricky K. Y. Fu ◽

Paul K. Chu

Keyword(s):

Glow Discharge ◽

Ion Implantation ◽

Impact Energy ◽

Discharge Plasma ◽

Glow Discharge Plasma ◽

Dose Uniformity ◽

Plasma Immersion Ion Implantation

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Plasma sheath physics and dose uniformity in enhanced glow discharge plasma immersion ion implantation and deposition

Journal of Applied Physics ◽

10.1063/1.3160309 ◽

2009 ◽

Vol 106 (1) ◽

pp. 013313 ◽

Cited By ~ 3

Author(s):

Liuhe Li ◽

Jianhui Li ◽

Dixon T. K. Kwok ◽

Zhuo Wang ◽

Paul K. Chu

Keyword(s):

Glow Discharge ◽

Ion Implantation ◽

Discharge Plasma ◽

Plasma Sheath ◽

Glow Discharge Plasma ◽

Dose Uniformity ◽

Plasma Immersion Ion Implantation

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Investigation of plasma potential and pulsed discharge characteristics in enhanced glow discharge plasma immersion ion implantation and deposition

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/j.nimb.2009.01.109 ◽

2009 ◽

Vol 267 (8-9) ◽

pp. 1696-1700 ◽

Cited By ~ 3

Author(s):

Liuhe Li ◽

Qiuyuan Lu ◽

Ricky K.Y. Fu ◽

Paul K. Chu

Keyword(s):

Glow Discharge ◽

Ion Implantation ◽

Discharge Plasma ◽

Plasma Potential ◽

Glow Discharge Plasma ◽

Pulsed Discharge ◽

Discharge Characteristics ◽

Plasma Immersion Ion Implantation

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Influence of annular magnet on discharge characteristics in enhanced glow discharge plasma immersion ion implantation

Applied Physics Letters ◽

10.1063/1.3537962 ◽

2011 ◽

Vol 98 (2) ◽

pp. 021502 ◽

Cited By ~ 2

Author(s):

Liu He Li ◽

Zhuo Wang ◽

Qiu Yuan Lu ◽

En Jing Pang ◽

Dan Dan Dun ◽

...

Keyword(s):

Glow Discharge ◽

Ion Implantation ◽

Discharge Plasma ◽

Glow Discharge Plasma ◽

Discharge Characteristics ◽

Plasma Immersion Ion Implantation

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The surface properties modification of polyethylene by enhanced glow discharge plasma immersion ion implantation

2010 3rd International Nanoelectronics Conference (INEC) ◽

10.1109/inec.2010.5425012 ◽

2010 ◽

Author(s):

Qiuyuan Lu ◽

Huaiyu Wang ◽

Liuhe Li ◽

Paul Chu

Keyword(s):

Glow Discharge ◽

Ion Implantation ◽

Surface Properties ◽

Discharge Plasma ◽

Glow Discharge Plasma ◽

Plasma Immersion Ion Implantation

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Theoretical investigation of sheath expansion and implant fluence uniformity in enhanced glow discharge plasma immersion ion implantation

Applied Physics Letters ◽

10.1063/1.2977962 ◽

2008 ◽

Vol 93 (9) ◽

pp. 091501 ◽

Cited By ~ 7

Author(s):

Dixon T. K. Kwok ◽

Qiu Yuan Lu ◽

Liu He Li ◽

Ricky K. Y. Fu ◽

Paul K. Chu

Keyword(s):

Glow Discharge ◽

Ion Implantation ◽

Theoretical Investigation ◽

Discharge Plasma ◽

Glow Discharge Plasma ◽

Plasma Immersion Ion Implantation

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Improved ion implant fluence uniformity in hydrogen enhanced glow discharge plasma immersion ion implantation into silicon

Review of Scientific Instruments ◽

10.1063/1.4875982 ◽

2014 ◽

Vol 85 (6) ◽

pp. 063506 ◽

Cited By ~ 2

Author(s):

J. Luo ◽

L. H. Li ◽

H. T. Liu ◽

K. M. Yu ◽

Y. Xu ◽

...

Keyword(s):

Glow Discharge ◽

Ion Implantation ◽

Discharge Plasma ◽

Glow Discharge Plasma ◽

Plasma Immersion Ion Implantation

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Investigation of plasma distribution in electron-focused electric field enhanced glow discharge plasma immersion ion implantation

Journal of Applied Physics ◽

10.1063/1.2969050 ◽

2008 ◽

Vol 104 (4) ◽

pp. 043303 ◽

Cited By ~ 8

Author(s):

Qiu Yuan Lu ◽

Liu He Li ◽

Ricky K. Y. Fu ◽

Paul K. Chu

Keyword(s):

Glow Discharge ◽

Electric Field ◽

Ion Implantation ◽

Discharge Plasma ◽

Glow Discharge Plasma ◽

Plasma Distribution ◽

Plasma Immersion Ion Implantation ◽

Focused Electric Field

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Improved hydrogen ionization rate in enhanced glow discharge plasma immersion ion implantation by enlarging the interaction path using an insulating tube

Review of Scientific Instruments ◽

10.1063/1.3544022 ◽

2011 ◽

Vol 82 (2) ◽

pp. 023503 ◽

Cited By ~ 4

Author(s):

Zhuo Wang ◽

Ying Zhu ◽

Liu He Li ◽

Qiu Yuan Lu ◽

Fu Shun He ◽

...

Keyword(s):

Glow Discharge ◽

Ion Implantation ◽

Discharge Plasma ◽

Ionization Rate ◽

Glow Discharge Plasma ◽

Hydrogen Ionization ◽

Plasma Immersion Ion Implantation

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Experimental investigation of discharge characteristics in enhanced glow discharge plasma immersion ion implantation

Physics Letters A ◽

10.1016/j.physleta.2008.08.026 ◽

2008 ◽

Vol 372 (40) ◽

pp. 6183-6186 ◽

Cited By ~ 6

Author(s):

Qiu Yuan Lu ◽

Liu He Li ◽

Ricky K.Y. Fu ◽

Paul K. Chu

Keyword(s):

Experimental Investigation ◽

Glow Discharge ◽

Ion Implantation ◽

Discharge Plasma ◽

Glow Discharge Plasma ◽

Discharge Characteristics ◽

Plasma Immersion Ion Implantation

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Numerical simulation of enhanced glow discharge plasma immersion ion implantation using three-dimensional PIC/MC model

Acta Physica Sinica ◽

10.7498/aps.61.225203 ◽

2012 ◽

Vol 61 (22) ◽

pp. 225203

Author(s):

He Fu-Shun ◽

Li Liu-He ◽

Li Fen ◽

Dun Dan-Dan ◽

Tao Chan-Cai

Keyword(s):

Numerical Simulation ◽

Glow Discharge ◽

Ion Implantation ◽

Discharge Plasma ◽

Three Dimensional ◽

Glow Discharge Plasma ◽

Plasma Immersion Ion Implantation

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