Fundamentals of epitaxial silicon film thickness measurements using emission and reflection Fourier transform infrared spectroscopy

Zhen‐Hong Zhou; Isabel Yang; Fuzhong Yu; Rafael Reif

doi:10.1063/1.354023

Fundamentals of epitaxial silicon film thickness measurements using emission and reflection Fourier transform infrared spectroscopy

Journal of Applied Physics ◽

10.1063/1.354023 ◽

1993 ◽

Vol 73 (11) ◽

pp. 7331-7337 ◽

Cited By ~ 6

Author(s):

Zhen‐Hong Zhou ◽

Isabel Yang ◽

Fuzhong Yu ◽

Rafael Reif

Keyword(s):

Fourier Transform ◽

Infrared Spectroscopy ◽

Film Thickness ◽

Fourier Transform Infrared Spectroscopy ◽

Silicon Film ◽

Fourier Transform Infrared ◽

Epitaxial Silicon ◽

Thickness Measurements ◽

Epitaxial Silicon Film

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Epi-film thickness measurements using emission Fourier transform infrared spectroscopy. I. Sensor characterization

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/66.401010 ◽

1995 ◽

Vol 8 (3) ◽

pp. 333-339 ◽

Cited By ~ 3

Author(s):

Zhen-Hong Zhou ◽

R. Reif

Keyword(s):

Fourier Transform ◽

Infrared Spectroscopy ◽

Film Thickness ◽

Fourier Transform Infrared Spectroscopy ◽

Fourier Transform Infrared ◽

Thickness Measurements

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Direct evidence of oxygen precipitates in epitaxial silicon obtained by micro‐Fourier transform infrared spectroscopy

Applied Physics Letters ◽

10.1063/1.105230 ◽

1991 ◽

Vol 58 (23) ◽

pp. 2657-2659 ◽

Cited By ~ 7

Author(s):

A. Borghesi ◽

M. Geddo ◽

B. Pivac ◽

A. Stella ◽

P. Lupano

Keyword(s):

Fourier Transform ◽

Infrared Spectroscopy ◽

Fourier Transform Infrared Spectroscopy ◽

Direct Evidence ◽

Fourier Transform Infrared ◽

Epitaxial Silicon ◽

Oxygen Precipitates

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Epitaxial layer thickness measurements using Fourier Transform Infrared Spectroscopy (FTIR)

Journal of Electronic Materials ◽

10.1007/bf02651743 ◽

1990 ◽

Vol 19 (2) ◽

pp. 181-185 ◽

Cited By ~ 4

Author(s):

R. A. Moellering ◽

L. B. Bauer ◽

C. L. Balestra

Keyword(s):

Fourier Transform ◽

Infrared Spectroscopy ◽

Fourier Transform Infrared Spectroscopy ◽

Layer Thickness ◽

Epitaxial Layer ◽

Fourier Transform Infrared ◽

Thickness Measurements

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Nondestructive measurement of homoepitaxially grown GaN film thickness with Fourier transform infrared spectroscopy

Japanese Journal of Applied Physics ◽

10.7567/jjap.56.120301 ◽

2017 ◽

Vol 56 (12) ◽

pp. 120301

Author(s):

Fumimasa Horikiri ◽

Yoshinobu Narita ◽

Takehiro Yoshida

Keyword(s):

Fourier Transform ◽

Infrared Spectroscopy ◽

Film Thickness ◽

Fourier Transform Infrared Spectroscopy ◽

Fourier Transform Infrared ◽

Nondestructive Measurement ◽

Gan Film

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Foam Films Stabilized with Lysophosphatidylcholine: A Comparison of Microinterferometric and Fourier Transform Infrared Spectroscopy Thickness Measurements

Langmuir ◽

10.1021/la9621022 ◽

1997 ◽

Vol 13 (12) ◽

pp. 3172-3176 ◽

Cited By ~ 7

Author(s):

R. Cohen ◽

D. Exerowa ◽

T. Kolarov ◽

T. Yamanaka ◽

T. Tano

Keyword(s):

Fourier Transform ◽

Infrared Spectroscopy ◽

Fourier Transform Infrared Spectroscopy ◽

Fourier Transform Infrared ◽

Foam Films ◽

Thickness Measurements

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Epi-film thickness measurements using emission Fourier transform infrared spectroscopy. II. Real-time in situ process monitoring and control

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/66.401011 ◽

1995 ◽

Vol 8 (3) ◽

pp. 340-345 ◽

Cited By ~ 2

Author(s):

Zhen-Hong Zhou ◽

R. Reif

Keyword(s):

Fourier Transform ◽

Infrared Spectroscopy ◽

Film Thickness ◽

Fourier Transform Infrared Spectroscopy ◽

Process Monitoring ◽

Monitoring And Control ◽

Process Monitoring And Control ◽

And Control ◽

Thickness Measurements

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Epifilm thickness measurements using Fourier transform infrared spectroscopy: Effect of refractive index dispersion and refractive index measurement

Journal of Applied Physics ◽

10.1063/1.357595 ◽

1994 ◽

Vol 76 (4) ◽

pp. 2448-2454 ◽

Cited By ~ 7

Author(s):

Zhen‐Hong Zhou ◽

Byungin Choi ◽

M. I. Flik ◽

S. Fan ◽

Rafael Reif

Keyword(s):

Refractive Index ◽

Fourier Transform ◽

Infrared Spectroscopy ◽

Fourier Transform Infrared Spectroscopy ◽

Fourier Transform Infrared ◽

Refractive Index Dispersion ◽

Refractive Index Measurement ◽

Index Measurement ◽

Thickness Measurements

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Characterization of epoxy coatings on steel by reflection/absorption fourier transform infrared spectroscopy. I. Effects of film thickness and angle of incidence

Journal of Applied Polymer Science ◽

10.1002/app.1986.070320815 ◽

1986 ◽

Vol 32 (8) ◽

pp. 6339-6352 ◽

Cited By ~ 8

Author(s):

T. Nguyen ◽

E. Byrd ◽

A. Tsao

Keyword(s):

Fourier Transform ◽

Infrared Spectroscopy ◽

Film Thickness ◽

Fourier Transform Infrared Spectroscopy ◽

Fourier Transform Infrared ◽

Angle Of Incidence ◽

Epoxy Coatings

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290. Preliminary Surface Evaluation of Isocyanate Containing Materials at Manufactring Locations Using Surface Reflectance Fourier Transform Infrared Spectroscopy

10.3320/1.2763139 ◽

1999 ◽

Author(s):

P. Logan ◽

W. Reagen

Keyword(s):

Fourier Transform ◽

Infrared Spectroscopy ◽

Fourier Transform Infrared Spectroscopy ◽

Fourier Transform Infrared ◽

Surface Reflectance

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Subclonal typing of ST131 E. coli by Fourier-transform infrared spectroscopy reveals variable metabolic profiles within the predominant H30 subclone

10.26226/morressier.56d5ba27d462b80296c96005 ◽

2016 ◽

Author(s):

Angela Novais

Keyword(s):

Fourier Transform ◽

Infrared Spectroscopy ◽

Fourier Transform Infrared Spectroscopy ◽

Fourier Transform Infrared ◽

Metabolic Profiles ◽

E Coli

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