Direct evidence of oxygen precipitates in epitaxial silicon obtained by micro‐Fourier transform infrared spectroscopy
2005 ◽
Vol 70
(17)
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pp. 6609-6615
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1999 ◽
2016 ◽
1992 ◽
Vol 7
(3)
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pp. 155-157
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2013 ◽
Vol 41
(10)
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pp. 1470