Direct evidence of oxygen precipitates in epitaxial silicon obtained by micro‐Fourier transform infrared spectroscopy

1991 ◽  
Vol 58 (23) ◽  
pp. 2657-2659 ◽  
Author(s):  
A. Borghesi ◽  
M. Geddo ◽  
B. Pivac ◽  
A. Stella ◽  
P. Lupano
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