The capacitance‐voltage characteristics and hydrogen concentration in phospho‐silicate glass films: Relation to phosphorus concentration and annealing effects
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1999 ◽
Vol 82
(7)
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pp. 1803-1808
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2001 ◽
Vol 19
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pp. 1788
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2010 ◽
Vol 268
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pp. 311-315
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2013 ◽
Vol 117
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pp. 5757-5764
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1996 ◽
Vol 196
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pp. 63-66
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