Temperature dependence of incorporation processes during heavy boron doping in silicon molecular beam epitaxy
2010 ◽
Vol 312
(9)
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pp. 1491-1495
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Keyword(s):
1995 ◽
Vol 34
(Part 1, No. 9A)
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pp. 4593-4598
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2001 ◽
Vol 227-228
◽
pp. 266-270
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2011 ◽
Vol 318
(1)
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pp. 450-453
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Keyword(s):
Keyword(s):
Keyword(s):
1998 ◽
Vol 13
(11)
◽
pp. 1247-1257
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