Temperature dependence of incorporation processes during heavy boron doping in silicon molecular beam epitaxy

1992 ◽  
Vol 71 (1) ◽  
pp. 118-125 ◽  
Author(s):  
C. P. Parry ◽  
R. A. Kubiak ◽  
S. M. Newstead ◽  
T. E. Whall ◽  
E. H. C. Parker
2001 ◽  
Vol 227-228 ◽  
pp. 266-270 ◽  
Author(s):  
Yasuaki Tatsuoka ◽  
Masaya Uemura ◽  
Takahiro Kitada ◽  
Satoshi Shimomura ◽  
Satoshi Hiyamizu

2011 ◽  
Vol 318 (1) ◽  
pp. 450-453 ◽  
Author(s):  
Chia-Hung Lin ◽  
Ryota Abe ◽  
Takahiro Maruyama ◽  
Shigeya Naritsuka

2005 ◽  
Vol 490 (2) ◽  
pp. 161-164 ◽  
Author(s):  
A. Caballero-Rosas ◽  
C. Mejía-García ◽  
G. Contreras-Puente ◽  
M. López-López

1981 ◽  
Vol 38 (12) ◽  
pp. 974-976 ◽  
Author(s):  
J. R. Pawlik ◽  
W. T. Tsang ◽  
F. R. Nash ◽  
R. L. Hartman ◽  
V. Swaminathan

Sign in / Sign up

Export Citation Format

Share Document