Material and electrical characterization of polycrystalline boron‐doped diamond films grown by microwave plasma chemical vapor deposition

K. Nishimura; K. Das; J. T. Glass

doi:10.1063/1.348582

Material and electrical characterization of polycrystalline boron‐doped diamond films grown by microwave plasma chemical vapor deposition

Journal of Applied Physics ◽

10.1063/1.348582 ◽

1991 ◽

Vol 69 (5) ◽

pp. 3142-3148 ◽

Cited By ~ 130

Author(s):

K. Nishimura ◽

K. Das ◽

J. T. Glass

Keyword(s):

Vapor Deposition ◽

Microwave Plasma ◽

Diamond Films ◽

Electrical Characterization ◽

Chemical Vapor ◽

Plasma Chemical ◽

Boron Doped Diamond ◽

Plasma Chemical Vapor Deposition ◽

Boron Doped

Download Full-text

Growth and characterization of diamond films on TiN/Si(100) by microwave plasma chemical vapor deposition

Diamond and Related Materials ◽

10.1016/j.diamond.2008.10.018 ◽

2009 ◽

Vol 18 (2-3) ◽

pp. 124-127 ◽

Cited By ~ 2

Author(s):

Wei-Chun Chen ◽

Wei-Lin Wang ◽

Rajanish N. Tiwari ◽

Li Chang

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Microwave Plasma ◽

Diamond Films ◽

Chemical Vapor ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition

Download Full-text

Cytotoxicity of Boron-Doped Nanocrystalline Diamond Films Prepared by Microwave Plasma Chemical Vapor Deposition

Plasma Science and Technology ◽

10.1088/1009-0630/17/7/08 ◽

2015 ◽

Vol 17 (7) ◽

pp. 574-578

Author(s):

Dan Liu ◽

Li Gou ◽

Junguo Ran ◽

Hong Zhu ◽

Xiang Zhang

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Microwave Plasma ◽

Diamond Films ◽

Chemical Vapor ◽

Nanocrystalline Diamond ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition ◽

Boron Doped ◽

Nanocrystalline Diamond Films

Download Full-text

Electrical characterization of graphene films synthesized by low-temperature microwave plasma chemical vapor deposition

Applied Physics Letters ◽

10.1063/1.4825103 ◽

2013 ◽

Vol 103 (15) ◽

pp. 153106 ◽

Cited By ~ 15

Author(s):

Yuki Okigawa ◽

Kazuo Tsugawa ◽

Takatoshi Yamada ◽

Masatou Ishihara ◽

Masataka Hasegawa

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Vapor Deposition ◽

Microwave Plasma ◽

Electrical Characterization ◽

Chemical Vapor ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition ◽

Graphene Films

Download Full-text

Field emission investigation of boron doped diamond thin films synthesized by microwave plasma chemical vapor deposition: Effect of vacuum annealing

2009 22nd International Vacuum Nanoelectronics Conference ◽

10.1109/ivnc.2009.5271662 ◽

2009 ◽

Author(s):

P.M. Koinkar ◽

D. Yonekura ◽

T.G. Kim ◽

M. A. More ◽

R. Murakami

Keyword(s):

Thin Films ◽

Vapor Deposition ◽

Microwave Plasma ◽

Vacuum Annealing ◽

Chemical Vapor ◽

Plasma Chemical ◽

Boron Doped Diamond ◽

Plasma Chemical Vapor Deposition ◽

Boron Doped ◽

Deposition Effect

Download Full-text

Hall effect measurements on boron‐doped, highly oriented diamond films grown on silicon via microwave plasma chemical vapor deposition

Applied Physics Letters ◽

10.1063/1.109414 ◽

1993 ◽

Vol 62 (19) ◽

pp. 2347-2349 ◽

Cited By ~ 52

Author(s):

B. R. Stoner ◽

Chien‐teh Kao ◽

D. M. Malta ◽

R. C. Glass

Keyword(s):

Chemical Vapor Deposition ◽

Hall Effect ◽

Vapor Deposition ◽

Microwave Plasma ◽

Diamond Films ◽

Chemical Vapor ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition ◽

Boron Doped ◽

Hall Effect Measurements

Download Full-text

Synthesis and structural characterization of highly 〈100〉-oriented {100}-faceted nanocrystalline diamond films by microwave plasma chemical vapor deposition

Journal of Crystal Growth ◽

10.1016/j.jcrysgro.2009.01.130 ◽

2009 ◽

Vol 311 (8) ◽

pp. 2258-2264 ◽

Cited By ~ 7

Author(s):

C.J. Tang ◽

S.M.S. Pereira ◽

A.J.S. Fernandes ◽

A.J. Neves ◽

J. Grácio ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Structural Characterization ◽

Vapor Deposition ◽

Microwave Plasma ◽

Diamond Films ◽

Chemical Vapor ◽

Nanocrystalline Diamond ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition

Download Full-text

Morphology and Structure Properties of Boron-doped Diamond Films Prepared by Hot Cathode Direct Current Plasma Chemical Vapor Deposition

Materials Science ◽

10.5755/j01.ms.22.2.12923 ◽

2016 ◽

Vol 22 (2) ◽

Author(s):

Mengmei PAN ◽

Hongyan PENG ◽

Wanbang ZHAO ◽

Hongwei JIANG

Keyword(s):

Vapor Deposition ◽

Diamond Films ◽

Chemical Vapor ◽

Plasma Chemical ◽

Boron Doped Diamond ◽

Plasma Chemical Vapor Deposition ◽

Boron Doped ◽

Direct Current Plasma ◽

Morphology And Structure ◽

Structure Properties

Download Full-text

Surface analysis of boron-doped polycrystalline diamond films deposited by a microwave plasma chemical vapor deposition system

Materials Chemistry and Physics ◽

10.1016/s0254-0584(99)00036-x ◽

1999 ◽

Vol 59 (2) ◽

pp. 143-148 ◽

Cited By ~ 13

Author(s):

B.R Huang ◽

C.H Wu ◽

W.Z Ke

Keyword(s):

Chemical Vapor Deposition ◽

Surface Analysis ◽

Vapor Deposition ◽

Microwave Plasma ◽

Diamond Films ◽

Chemical Vapor ◽

Polycrystalline Diamond ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition ◽

Boron Doped

Download Full-text

The effect of pressure on growth rate and quality of diamond films prepared by microwave plasma chemical vapor deposition

Acta Physica Sinica ◽

10.7498/aps.56.7183 ◽

2007 ◽

Vol 56 (12) ◽

pp. 7183

Author(s):

物理学报

Keyword(s):

Growth Rate ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Microwave Plasma ◽

Diamond Films ◽

Chemical Vapor ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition ◽

Effect Of Pressure

Download Full-text

Deposition of smooth, oriented diamond films using microwave plasma chemical vapor deposition

Thin Solid Films ◽

10.1016/0040-6090(92)90512-a ◽

1992 ◽

Vol 212 (1-2) ◽

pp. 140-149 ◽

Cited By ~ 26

Author(s):

F.G. Celii ◽

D. White ◽

A.J. Purdes

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Microwave Plasma ◽

Diamond Films ◽

Chemical Vapor ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition

Download Full-text