Plasma sheath thickness in radio‐frequency discharges
1963 ◽
Vol 19
(8)
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pp. 1309-1317
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Keyword(s):
1991 ◽
Vol 19
(2)
◽
pp. 122-129
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2017 ◽
Vol 15
(3)
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pp. 1700169
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Keyword(s):
Keyword(s):
2019 ◽
Vol 16
(11)
◽
pp. 1900093
◽
Keyword(s):