Annealing effects on a high-k lanthanum oxide film on Si (001) analyzed by aberration-corrected transmission electron microscopy/scanning transmission electron microscopy and electron energy loss spectroscopy
2010 ◽
Vol 101
(1)
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pp. 21-26
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2011 ◽
Vol 46
(12)
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pp. 4157-4161
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2021 ◽