Annealing effects on a high-k lanthanum oxide film on Si (001) analyzed by aberration-corrected transmission electron microscopy/scanning transmission electron microscopy and electron energy loss spectroscopy

2010 ◽  
Vol 107 (12) ◽  
pp. 124510 ◽  
Author(s):  
S. Inamoto ◽  
J. Yamasaki ◽  
E. Okunishi ◽  
K. Kakushima ◽  
H. Iwai ◽  
...  
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