Channel strain analysis in high-performance damascene-gate p-metal-oxide-semiconductor field effect transistors using high-spatial resolution Raman spectroscopy
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2011 ◽
Vol 29
(3)
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pp. 032211
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2006 ◽
Vol 45
(4B)
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pp. 3110-3116
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1988 ◽
Vol 6
(6)
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pp. 1836
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2019 ◽
Vol 7
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pp. 596-600
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