Kinetics of titanium silicide formation on single‐crystal Si: Experiment and modeling
1989 ◽
Vol 333
(4-5)
◽
pp. 569-575
◽
Keyword(s):
1990 ◽
Vol 55
(2)
◽
pp. 345-353
◽
2004 ◽
Vol 381
(1-2)
◽
pp. 237-248
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Keyword(s):
2015 ◽
Vol 2
◽
pp. S440-S452
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1987 ◽
Vol 87
(4)
◽
pp. 2305-2315
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1989 ◽
Vol 4
(7)
◽
pp. 526-528
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