Nanoscale range finding of subsurface structures by measuring the absolute phase lag of thermal wave

2010 ◽  
Vol 81 (5) ◽  
pp. 053701 ◽  
Author(s):  
Jaehun Chung ◽  
Kyeongtae Kim ◽  
Gwangseok Hwang ◽  
Ohmyoung Kwon ◽  
Joon Sik Lee ◽  
...  
Keyword(s):  
Thermal Wave ◽  
Phase Lag ◽  
Subsurface Structures ◽  
Range Finding ◽  
Absolute Phase ◽  
The Absolute ◽  
Nanoscale Range

Scanning Thermal Wave Microscopy (STWM)

2003 ◽  
Vol 125 (1) ◽  
pp. 156-163 ◽  
Author(s):  
Ohmyoung Kwon ◽  
Li Shi ◽  
Arun Majumdar
Keyword(s):  
Thermal Wave ◽  
Three Dimensional ◽  
Sample Surface ◽  
Resolving Power ◽  
Phase Lag ◽  
Thermal Waves ◽  
Element Analysis ◽  
Buried Structures ◽  
Subsurface Structures ◽  
Benchmark Experiment

This paper presents a technique, scanning thermal wave microscopy (STWM), which can image the phase lag and amplitude of thermal waves with sub-micrometer resolution by scanning a temperature-sensing nanoscale tip across a sample surface. Phase lag measurements during tip-sample contact showed enhancement of tip-sample heat transfer due to the presence of a liquid film. The measurement accuracy of STWM is proved by a benchmark experiment and comparison to theoretical prediction. The application of STWM for sub-surface imaging of buried structures is demonstrated by measuring the phase lag and amplitude distributions of an interconnect via sample. The measurement showed excellent agreement with a finite element analysis offering the promising prospects of three-dimensional thermal probing of micro and nanostructures. Finally, it was shown that the resolving power of thermal waves for subsurface structures improves as the wavelengths of the thermal waves become shorter at higher modulation frequencies.

Strong-field photoionization in the few-optical-cycle regime: the role of the absolute phase

2002 ◽  
Author(s):  
M. Nisoli ◽  
S. Stagira ◽  
E. Priori ◽  
G. Sansone ◽  
S. De Silvestri ◽  
...  
Keyword(s):  
Strong Field ◽  
Absolute Phase ◽  
Optical Cycle ◽  
The Absolute

Double Directions Nanoscale Range Finding Using Fano Resonance in Coupled Gratings

Plasmonics ◽  
2016 ◽  
Vol 11 (5) ◽  
pp. 1331-1336 ◽  
Author(s):  
Zi-Xun Jia ◽  
Yong Shuai ◽  
Xiang Chen ◽  
He-Ping Tan
Keyword(s):  
Fano Resonance ◽  
Range Finding ◽  
Nanoscale Range

An influence of the absolute phase of THz pulse on linear and nonlinear medium response

2011 ◽  
Author(s):  
Vyacheslav A. Trofimov ◽  
Svetlana A. Varentsova ◽  
Norbert Palka ◽  
Mieczyslaw Szustakowski ◽  
Tomasz Trzcinski ◽  
...  
Keyword(s):  
Nonlinear Medium ◽  
Absolute Phase ◽  
Linear And Nonlinear ◽  
The Absolute

scholarly journals High-resolution Three-dimensional Surface Imaging Microscope Based on Digital Fringe Projection Technique

2020 ◽  
Vol 20 (3) ◽  
pp. 139-144
Author(s):  
Cheng-Yang Liu ◽  
Tzu-Ping Yen ◽  
Chien-Wen Chen
Keyword(s):  
High Resolution ◽  
Imaging System ◽  
Three Dimensional ◽  
Fringe Projection ◽  
Surface Imaging ◽  
Projection Technique ◽  
Digital Fringe Projection ◽  
Absolute Phase ◽  
The Absolute ◽  
Fringe Patterns

AbstractThe three-dimensional (3-D) micro-scale surface imaging system based on the digital fringe projection technique for the assessments of microfiber and metric screw is presented in this paper. The proposed system comprises a digital light processing (DLP) projector, a set of optical lenses, a microscope, and a charge coupled device (CCD). The digital seven-step fringe patterns from the DLP projector pass through a set of optical lenses before being focused on the target surface. A set of optical lenses is designed for adjustment and size coupling of fringe patterns. A high-resolution CCD camera is employed to picture these distorted fringe patterns. The wrapped phase map is calculated by seven-step phase-shifting calculation from these distorted fringe patterns. The unwrapping calculation with quality guided path is introduced to compute the absolute phase values. The dimensional calibration methods are used to acquire the transformation between real 3-D shape and the absolute phase value. The capability of complex surface measurement for our system is demonstrated by using ISO standard screw M1.6. The experimental results for microfiber with 3 μm diameter indicate that the spatial and vertical resolutions can reach about 3 μm in our system. The proposed system provides a fast digital imaging system to examine the surface features with high-resolution for automatic optical inspection industry.

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