Hydrogenated amorphous carbon dielectric coatings for magneto‐optic data storage media

1988 ◽  
Vol 64 (9) ◽  
pp. 4646-4650 ◽  
Author(s):  
C. J. Robinson ◽  
R. N. Payne ◽  
A. E. Bell
Keyword(s):  
Data Storage ◽  
Amorphous Carbon ◽  
Hydrogenated Amorphous Carbon ◽  
Dielectric Coatings ◽  
Storage Media ◽  
Hydrogenated Amorphous ◽  
Magneto Optic

Oxidation Kinetics of Hydrogenated Amorphous Carbon (a-CHx) Overcoats for Magnetic Data Storage Media

Langmuir ◽  
2007 ◽  
Vol 23 (10) ◽  
pp. 5485-5490 ◽  
Author(s):  
Yang Yun ◽  
Xiaoding Ma ◽  
Jing Gui ◽  
Esteban Broitman ◽  
Andrew J. Gellman
Keyword(s):  
Data Storage ◽  
Amorphous Carbon ◽  
Oxidation Kinetics ◽  
Magnetic Data Storage ◽  
Magnetic Data ◽  
Hydrogenated Amorphous Carbon ◽  
Storage Media ◽  
Hydrogenated Amorphous ◽  
Kinetics Of

NITROGEN INCORPORATED HYDROGENATED AMORPHOUS CARBON THIN FILMS DEPOSITED BY MICROWAVE SURFACE-WAVE PLASMA CHEMICAL VAPOR DEPOSITION

2009 ◽  
Vol 23 (09) ◽  
pp. 2159-2165 ◽  
Author(s):  
SUDIP ADHIKARI ◽  
MASAYOSHI UMENO
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Surface Wave ◽  
Amorphous Carbon ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Plasma Chemical ◽  
Hydrogenated Amorphous Carbon ◽  
Plasma Chemical Vapor Deposition ◽  
Hydrogenated Amorphous

Nitrogen incorporated hydrogenated amorphous carbon (a-C:N:H) thin films have been deposited by microwave surface-wave plasma chemical vapor deposition on silicon and quartz substrates, using helium, methane and nitrogen ( N 2) as plasma source. The deposited a-C:N:H films were characterized by their optical, structural and electrical properties through UV/VIS/NIR spectroscopy, Raman spectroscopy, atomic force microscope and current-voltage characteristics. The optical band gap decreased gently from 3.0 eV to 2.5 eV with increasing N 2 concentration in the films. The a-C:N:H film shows significantly higher electrical conductivity compared to that of N 2-free a-C:H film.

scholarly journals Reactive High-Power Impulse Magnetron Sputtering of Chromium-Carbon Films

Coatings ◽  
2020 ◽  
Vol 10 (12) ◽  
pp. 1269
Author(s):  
Chin-Chiuan Kuo ◽  
Chun-Hui Lin ◽  
Jing-Tang Chang ◽  
Yu-Tse Lin
Keyword(s):  
Magnetron Sputtering ◽  
Amorphous Carbon ◽  
High Power ◽  
Deposition Temperature ◽  
Average Power ◽  
Carbon Films ◽  
Strengthening Effect ◽  
Substrate Bias ◽  
Hydrogenated Amorphous Carbon ◽  
Hydrogenated Amorphous

Chromium-carbon films were deposited by utilizing reactive high-power impulse magnetron sputtering at different mixture ratios of ethyne and argon atmosphere, and different substrate bias voltages and deposition temperature, with the same pulse frequency, duty cycle, and average power. The microstructure and mechanical properties of the obtained films were compared. The films consist of amorphous or nanocrystalline chromium carbide, hydrogenated amorphous carbon, and minor α-chromium phase. Decreasing the fraction of ethyne increases the content of the α-chromium phase but decreases hydrogenated amorphous carbon phase. The film’s hardness increases by enhancing the negative substrate bias and raising the deposition temperature, which could be attributed to the increase of film density and the Hall–Petch strengthening effect induced by the nanoscale crystallization of the amorphous carbide phase.

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