Rutherford backscattering and transmission electron microscopy study on phase transformation of As heavily doped Si during post‐rapid‐thermal annealing
1991 ◽
Vol 10
(15)
◽
pp. 905-907
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1998 ◽
Vol 16
(1)
◽
pp. 327
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1991 ◽
Vol 63
(4)
◽
pp. 747-755
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2009 ◽
Vol 60
(9)
◽
pp. 799-802
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2002 ◽
Vol 82
(4)
◽
pp. 735-749
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1996 ◽
Vol 74
(2)
◽
pp. 57-66
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