Atomic chlorine concentration and gas temperature measurements in a plasma etching reactor
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1981 ◽
Vol 14
(8)
◽
pp. 301-305
◽
2008 ◽
Vol 30
(1)
◽
pp. 265-275
◽
2011 ◽
Vol 20
(2)
◽
pp. 024002
◽
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