Quantification of the effects of generation volume, surface recombination velocity, and diffusion length on the electron‐beam‐induced current and its derivative: Determination of diffusion lengths in the low micron and submicron ranges

1985 ◽  
Vol 57 (6) ◽  
pp. 1978-1984 ◽  
Author(s):  
Keung L. Luke ◽  
Oldwig von Roos ◽  
Li‐jen Cheng
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