Effect of flat‐band voltage shift and nonvolatile memory in platinum‐diffused metal‐oxide‐semiconductor devices

1984 ◽  
Vol 56 (4) ◽  
pp. 1160-1164 ◽  
Author(s):  
Hideo Kato ◽  
Seiichi Mori ◽  
Hiroshi Kuwano
Keyword(s):  
Metal Oxide ◽  
Nonvolatile Memory ◽  
Semiconductor Devices ◽  
Metal Oxide Semiconductor ◽  
Oxide Semiconductor ◽  
Flat Band ◽  
Flat Band Voltage ◽  
Voltage Shift

Oxide Charging Effects by PH3/He Ion Shower Doping

2000 ◽  
Vol 621 ◽  
Author(s):  
Cheon-Hong Kim ◽  
Juhn-Suk Yoo ◽  
Kee-Chan Park ◽  
Min-Koo Han
Keyword(s):  
Metal Oxide ◽  
Thermal Annealing ◽  
Oxide Films ◽  
Metal Oxide Semiconductor ◽  
Oxide Semiconductor ◽  
Flat Band ◽  
Flat Band Voltage ◽  
Mos Capacitors ◽  
Voltage Shift ◽  
Mos Structure

ABSTRACTWe report the oxide charging effects on metal oxide semiconductor (MOS) structure caused by PH3/He ion shower doping. The parallel negative shift of flat-band voltage occurred for the ion-doped PETEOS samples even after thermal annealing. When the ion dose was higher, this shift was larger. These results show that a considerable amount of positive charges were induced inside the oxide films after PH3/He ion shower doping process. For the same ion dose, the flat-band voltage shift is larger when the thickness of PETEOS is thicker. When the ion dose was 1.5×1017cm−2 and the thickness of PETEOS was 80nm, the shift of flat-band voltage was larger than −7V. We can conclude that PH3/He ion shower doping process induces the positive charges, which result in the flat band voltage shift of MOS capacitors, in the bulk oxide films when oxide films are exposed to ion shower doping.

scholarly journals Origin of flatband voltage shift and unusual minority carrier generation in thermally grown GeO2/Ge metal-oxide-semiconductor devices

2009 ◽  
Vol 94 (20) ◽  
pp. 202112 ◽  
Author(s):  
Takuji Hosoi ◽  
Katsuhiro Kutsuki ◽  
Gaku Okamoto ◽  
Marina Saito ◽  
Takayoshi Shimura ◽  
...  
Keyword(s):  
Metal Oxide ◽  
Minority Carrier ◽  
Semiconductor Devices ◽  
Metal Oxide Semiconductor ◽  
Oxide Semiconductor ◽  
Carrier Generation ◽  
Voltage Shift ◽  
Flatband Voltage ◽  
Thermally Grown
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