Pile up of implanted phosphorus during palladium silicide formation and the characteristics of Schottky barrier diodes
Keyword(s):
Pile Up
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1976 ◽
Vol 9
(6)
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pp. 965-972
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1985 ◽
Vol 14
(3)
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pp. 283-296
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2016 ◽
Vol 136
(4)
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pp. 479-483
2019 ◽
Vol 780
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pp. 476-481
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Keyword(s):