Multilayer barrier films comprising nitrogen spacers between free-standing barrier layers

2009 ◽  
Vol 95 (9) ◽  
pp. 093306 ◽  
Author(s):  
Jimmy Granstrom ◽  
Michael Villet ◽  
Tirtha Chatterjee ◽  
Jeffrey A. Gerbec ◽  
Evan Jerkunica ◽  
...  
Keyword(s):  
Free Standing ◽  
Barrier Layers ◽  
Barrier Films ◽  
Multilayer Barrier

Bio-based multilayer barrier films by extrusion, dispersion coating and atomic layer deposition

2015 ◽  
Vol 133 (2) ◽  
pp. n/a-n/a ◽  
Author(s):  
Jari Vartiainen ◽  
Yingfeng Shen ◽  
Timo Kaljunen ◽  
Tero Malm ◽  
Mika Vähä-Nissi ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Barrier Films ◽  
Layer Deposition ◽  
Multilayer Barrier

Mechanisms of vapor permeation through multilayer barrier films: Lag time versus equilibrium permeation

2004 ◽  
Vol 96 (4) ◽  
pp. 1840-1849 ◽  
Author(s):  
G. L. Graff ◽  
R. E. Williford ◽  
P. E. Burrows
Keyword(s):  
Lag Time ◽  
Barrier Films ◽  
Vapor Permeation ◽  
Multilayer Barrier

Mechanical and degradation behaviour of multilayer barrier films

2017 ◽  
Vol 143 ◽  
pp. 214-230 ◽  
Author(s):  
Demetres Briassoulis ◽  
Philippos Tserotas ◽  
Miltiadis Hiskakis
Keyword(s):  
Degradation Behaviour ◽  
Barrier Films ◽  
Multilayer Barrier

Time-dependent water vapor permeation through multilayer barrier films: Empirical versus theoretical results

2019 ◽  
Vol 672 ◽  
pp. 199-205 ◽  
Author(s):  
Sandra Kiese ◽  
Esra Kücükpinar ◽  
Oliver Miesbauer ◽  
Horst-Christian Langowski
Keyword(s):  
Water Vapor ◽  
Time Dependent ◽  
Barrier Films ◽  
Vapor Permeation ◽  
Multilayer Barrier ◽  
Theoretical Results ◽  
Water Vapor Permeation

Development of multilayer barrier films of thermoplastic starch and low-density polyethylene

2020 ◽  
Vol 27 (2) ◽  
Author(s):  
Thomas Mazerolles ◽  
Marie-Claude Heuzey ◽  
Maria Soliman ◽  
Hans Martens ◽  
Ralf Kleppinger ◽  
...  
Keyword(s):  
Thermoplastic Starch ◽  
Low Density Polyethylene ◽  
Low Density ◽  
Barrier Films ◽  
Multilayer Barrier

Biodegradable multilayer barrier films based on alginate/polyethyleneimine and biaxially oriented poly(lactic acid)

2013 ◽  
Vol 92 (2) ◽  
pp. 1579-1585 ◽  
Author(s):  
Chun-Hong Gu ◽  
Jia-Jun Wang ◽  
Yang Yu ◽  
Hui Sun ◽  
Ning Shuai ◽  
...  
Keyword(s):  
Lactic Acid ◽  
Poly Lactic Acid ◽  
Barrier Films ◽  
Multilayer Barrier

Effect of barrier layers on the texture and microstructure of Copper films

2003 ◽  
Vol 766 ◽  
Author(s):  
Tejodher Muppidi ◽  
David P Field
Keyword(s):  
Barrier Layer ◽  
Copper Film ◽  
Copper Films ◽  
Microstructure Development ◽  
Deposition Technique ◽  
Barrier Layers ◽  
Barrier Films ◽  
Final Microstructure ◽  
Layer Stacking ◽  
Interconnect Material

AbstractThe microstructure of interconnect material is know to influence its electromigration and stress-voiding properties. In addition to many factors responsible for the microstructure development, the barrier layer could be a major contributing factor as it forms the substrate for the copper films above. The microstructure of the barrier films based on its deposition technique could determine the final microstructure of the copper film. In the present work we examine the effect of two different barrier layers (Ta and TaN) and different stackings of these two materials on the microstructure on the copper seed (PVD) and electroplated films using EBSD, AFM and XRD. The results show that the plated films have a predominantly (111) texture and uniform grain size. But the (111) texture maximum varied with the barrier layer stacking underneath the plated film.

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