Formation of periodic strained layers associated with nanovoids inside a silicon carbide single crystal induced by femtosecond laser irradiation
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2014 ◽
Vol 22
(1)
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pp. 15-18
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2006 ◽
Vol 45
(No. 16)
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pp. L444-L446
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2012 ◽
Vol 263
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pp. 436-439
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Keyword(s):
Fabrication of through holes in silicon carbide using femtosecond laser irradiation and acid etching
2014 ◽
Vol 289
◽
pp. 529-532
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Keyword(s):
Keyword(s):