Submicron-scale diamond selective-area growth by hot-filament chemical vapor deposition

Thin Solid Films ◽

10.1016/j.tsf.2016.07.017 ◽

2016 ◽

Vol 615 ◽

pp. 239-242 ◽

Cited By ~ 5

Author(s):

Shinya Ohmagari ◽

Takeshi Matsumoto ◽

Hitoshi Umezawa ◽

Yoshiaki Mokuno

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Selective Area Growth ◽

Selective Area ◽

Submicron Scale ◽

Area Growth ◽

Hot Filament

Download Full-text

Thermally stable heavily boron-doped diamond resistors fabricated via selective area growth by hot-filament chemical vapor deposition

Thin Solid Films ◽

10.1016/j.tsf.2019.04.029 ◽

2019 ◽

Vol 680 ◽

pp. 81-84

Author(s):

Shin-ichiro Suzuki ◽

Shinya Ohmagari ◽

Hiroyuki Kawashima ◽

Takeyasu Saito ◽

Hitoshi Umezawa ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Selective Area Growth ◽

Thermally Stable ◽

Boron Doped Diamond ◽

Selective Area ◽

Boron Doped ◽

Area Growth ◽

Hot Filament

Download Full-text

Selective area growth of InP on lithography-free, nanopatterned GaAs(001) by metalorganic chemical vapor deposition

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

10.1116/1.4855035 ◽

2014 ◽

Vol 32 (1) ◽

pp. 011210 ◽

Cited By ~ 1

Author(s):

Qi Wang ◽

Zhiqiang Bian ◽

Zhigang Jia ◽

Zhihong Pan ◽

Shiwei Cai ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Selective Area Growth ◽

Selective Area ◽

Area Growth ◽

Metalorganic Chemical

Download Full-text

Analytical solution of thickness variations in selective area growth by organometallic chemical vapor deposition

Applied Physics Letters ◽

10.1063/1.3157266 ◽

2009 ◽

Vol 94 (25) ◽

pp. 253112 ◽

Cited By ~ 3

Author(s):

X. Liu ◽

D. E. Aspnes

Keyword(s):

Chemical Vapor Deposition ◽

Analytical Solution ◽

Vapor Deposition ◽

Chemical Vapor ◽

Selective Area Growth ◽

Selective Area ◽

Area Growth ◽

Thickness Variations ◽

Organometallic Chemical Vapor Deposition

Download Full-text

Mechanism of selective area growth of GaN nanorods by pulsed mode metalorganic chemical vapor deposition

Nanotechnology ◽

10.1088/0957-4484/23/46/465601 ◽

2012 ◽

Vol 23 (46) ◽

pp. 465601 ◽

Cited By ~ 35

Author(s):

Yen-Ting Lin ◽

Ting-Wei Yeh ◽

P Daniel Dapkus

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Selective Area Growth ◽

Selective Area ◽

Pulsed Mode ◽

Area Growth ◽

Metalorganic Chemical

Download Full-text

Minimization of wafer bowing in GaN-based vertical light-emitting diodes by selective area growth using metal-organic chemical vapor deposition

Journal of Crystal Growth ◽

10.1016/j.jcrysgro.2010.10.104 ◽

2011 ◽

Vol 314 (1) ◽

pp. 66-70 ◽

Cited By ~ 2

Author(s):

Jae Hyoung Ryu ◽

S. Chandramohan ◽

Hee Yun Kim ◽

Hyun Kyu Kim ◽

Ji Hye Kang ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Selective Area Growth ◽

Light Emitting ◽

Selective Area ◽

Area Growth ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

Download Full-text

Fabrication and modeling of optical interconnects using selective area growth metalorganic chemical vapor deposition

Conference Digest. ISLC 1998 NARA. 1998 IEEE 16th International Semiconductor Laser Conference (Cat. No. 98CH361130) ◽

10.1109/islc.1998.734204 ◽

2002 ◽

Author(s):

M.A. Alam ◽

R. People ◽

S.K. Sputz ◽

M.S. Hybertsen ◽

E. Isaacs ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Optical Interconnects ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Selective Area Growth ◽

Selective Area ◽

Area Growth ◽

Metalorganic Chemical

Download Full-text

Selective Area Growth of Single-Crystalline Alpha-Gallium Oxide on a Sapphire Nanomembrane by Mist Chemical Vapor Deposition

ACS Applied Electronic Materials ◽

10.1021/acsaelm.1c00512 ◽

2021 ◽

Author(s):

Duyoung Yang ◽

Byungsoo Kim ◽

Tae Hyung Lee ◽

Jehong Oh ◽

Seungmin Lee ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Gallium Oxide ◽

Chemical Vapor ◽

Selective Area Growth ◽

Single Crystalline ◽

Selective Area ◽

Area Growth

Download Full-text

Analysis of mass transport mechanism in InGaN epitaxy on ridge shaped selective area growth GaN by metal organic chemical vapor deposition

Journal of Applied Physics ◽

10.1063/1.2829784 ◽

2008 ◽

Vol 103 (1) ◽

pp. 014908 ◽

Cited By ~ 27

Author(s):

H. Fang ◽

Z. J. Yang ◽

Y. Wang ◽

T. Dai ◽

L. W. Sang ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Transport Mechanism ◽

Chemical Vapor ◽

Organic Chemical ◽

Selective Area Growth ◽

Selective Area ◽

Area Growth ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

Download Full-text

Index guided single stripe lasers fabricated by selective area growth in a metalorganic chemical vapor deposition system

Journal of Applied Physics ◽

10.1063/1.339426 ◽

1987 ◽

Vol 62 (6) ◽

pp. 2569-2570 ◽

Cited By ~ 2

Author(s):

J. J. Yang ◽

S. S. Ou ◽

M. Jansen ◽

J. Wilcox ◽

M. Sergant

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Selective Area Growth ◽

Selective Area ◽

Area Growth ◽

Metalorganic Chemical

Download Full-text

Metalorganic chemical vapor deposition of GaN nanowires: From catalyst-assisted to catalyst-free growth, and from self-assembled to selective-area growth

Materials Science in Semiconductor Processing ◽

10.1016/j.mssp.2016.03.025 ◽

2016 ◽

Vol 55 ◽

pp. 51-58 ◽

Cited By ~ 7

Author(s):

Blandine Alloing ◽

Jesús Zúñiga-Pérez

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Selective Area Growth ◽

Gan Nanowires ◽

Selective Area ◽

Area Growth ◽

Free Growth ◽

Metalorganic Chemical

Download Full-text