Impact of boron-interstitial clusters on Hall scattering factor in high-dose boron-implanted ultrashallow junctions
2012 ◽
Vol 717-720
◽
pp. 237-240
◽
2001 ◽
Vol 40
(Part 1, No. 4A)
◽
pp. 2506-2507
Keyword(s):
1978 ◽
Vol 36
(3)
◽
pp. 61-69
1983 ◽
Vol 41
◽
pp. 362-365
Keyword(s):
1985 ◽
Vol 43
◽
pp. 300-301
Defect reduction in oxygen implanted silicon-on-insulator material during high-temperature annealing
1989 ◽
Vol 47
◽
pp. 604-605