New Approaches for Characterization of Advanced Annealing Techniques for Ultra-Shallow Junction Formation

2008 ◽  
Author(s):  
Paul Timans ◽  
Yao Zhi Hu ◽  
Jeff Gelpey ◽  
Steve McCoy ◽  
Wilfried Lerch ◽  
...  
Keyword(s):  
Shallow Junction ◽  
New Approaches ◽  
Junction Formation

Fundamental characterization of the effect of nitride sidewall spacer process on boron dose loss in ultra-shallow junction formation

2004 ◽  
Vol 114-115 ◽  
pp. 390-396 ◽  
Author(s):  
P. Kohli ◽  
S. Chakravarthi ◽  
Amitabh Jain ◽  
H. Bu ◽  
M. Mehrotra ◽  
...  
Keyword(s):  
Shallow Junction ◽  
Junction Formation

Using point defect engineering to reduce the effects of energy nonmonochromaticity of B ion beams on shallow junction formation

2004 ◽  
Vol 96 (1) ◽  
pp. 919-921 ◽  
Author(s):  
Lin Shao ◽  
John Chen ◽  
Jianming Zhang ◽  
D. Tang ◽  
Sanjay Patel ◽  
...  
Keyword(s):  
Point Defect ◽  
Ion Beams ◽  
Defect Engineering ◽  
Shallow Junction ◽  
Junction Formation

Shallow junction formation by preamorphization with tin implantation

1986 ◽  
Vol 49 (10) ◽  
pp. 575-577 ◽  
Author(s):  
M. Delfino ◽  
D. K. Sadana ◽  
A. E. Morgan
Keyword(s):  
Shallow Junction ◽  
Junction Formation

Gas immersion laser doping (GILD) for ultra-shallow junction formation

2004 ◽  
Vol 453-454 ◽  
pp. 106-109 ◽  
Author(s):  
G. Kerrien ◽  
T. Sarnet ◽  
D. Débarre ◽  
J. Boulmer ◽  
M. Hernandez ◽  
...  
Keyword(s):  
Shallow Junction ◽  
Laser Doping ◽  
Junction Formation
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