Interface control and leakage current conduction mechanism in HfO2 film prepared by pulsed laser deposition

2008 ◽  
Vol 93 (20) ◽  
pp. 202904 ◽  
Author(s):  
Hao Wang ◽  
Y. Wang ◽  
J. Zhang ◽  
C. Ye ◽  
H. B. Wang ◽  
...  
Keyword(s):  
Pulsed Laser Deposition ◽  
Leakage Current ◽  
Conduction Mechanism ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Hfo2 Film ◽  
Interface Control ◽  
Current Conduction

Pulsed Laser Deposition of Bi4Ti3O12 Thin Films on Indium Tin Oxide Coated Glass

1994 ◽  
Vol 343 ◽  
Author(s):  
H-J. Cho ◽  
William Jo ◽  
T. W. Noh
Keyword(s):  
Electron Microscopy ◽  
Thin Films ◽  
Pulsed Laser Deposition ◽  
Leakage Current ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Chemical Compositions ◽  
Coated Glass

ABSTRACTBi4Ti3O12 thin films have been grown on indium tin oxide coated glass by pulsed laser deposition. The films are rapidly thermal annealed at 650 °C in various kinds of ambients. X-ray diffraction and scanning electron microscopy are used to investigate crystallization and microstructures, respectively. Using Auger electron microscopy, chemical compositions and depth profiles are examined. Optical and current-voltage characteristics measurements of the films show that their transmittance and leakage current behaviors are strongly dependent upon the microstructures. O2 partial pressure in the rapid thermal annealing process is found to be an important parameter which determines crystallization, microstructures, and leakage current behaviors of the Bi4Ti3O12 thin films.

scholarly journals Challenges for Pulsed Laser Deposition of FeSe Thin Films

Micromachines ◽  
2021 ◽  
Vol 12 (10) ◽  
pp. 1224
Author(s):  
Yukiko Obata ◽  
Igor A. Karateev ◽  
Ivan Pavlov ◽  
Alexander L. Vasiliev ◽  
Silvia Haindl
Keyword(s):  
Thin Films ◽  
Pulsed Laser Deposition ◽  
Film Growth ◽  
Mechanical Strain ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Superconducting Properties ◽  
Surface Protection ◽  
Sensor Applications ◽  
Interface Control

Anti-PbO-type FeSe shows an advantageous dependence of its superconducting properties with mechanical strain, which could be utilized as future sensor functionality. Although superconducting FeSe thin films can be grown by various methods, ultrathin films needed in potential sensor applications were only achieved on a few occasions. In pulsed laser deposition, the main challenges can be attributed to such factors as controlling film stoichiometry (i.e., volatile elements during the growth), nucleation, and bonding to the substrate (i.e., film/substrate interface control) and preventing the deterioration of superconducting properties (i.e., by surface oxidization). In the present study, we address various technical issues in thin film growth of FeSe by pulsed laser deposition, which pose constraints in engineering and reduce the application potential for FeSe thin films in sensor devices. The results indicate the need for sophisticated engineering protocols that include interface control and surface protection from chemical deterioration. This work provides important actual limitations for pulsed laser deposition (PLD) of FeSe thin films with the thicknesses below 30 nm.

Ferroelectric, piezoelectric, and leakage current properties of (K0.48Na0.48Li0.04)(Nb0.775Ta0.225)O3 thin films grown by pulsed laser deposition

2011 ◽  
Vol 98 (2) ◽  
pp. 022902 ◽  
Author(s):  
D. Y. Wang ◽  
D. M. Lin ◽  
K. W. Kwok ◽  
N. Y. Chan ◽  
J. Y. Dai ◽  
...  
Keyword(s):  
Thin Films ◽  
Pulsed Laser Deposition ◽  
Leakage Current ◽  
Pulsed Laser ◽  
Laser Deposition

Leakage Current Behaviors of SrTiO3/BiFeO3 Multi-Layers Fabricated by Pulsed Laser Deposition

2012 ◽  
Vol 134 (1) ◽  
pp. 133-138 ◽  
Author(s):  
S. W. Kim ◽  
H. I. Choi ◽  
M. H. Lee ◽  
D. Do ◽  
S. S. Kim ◽  
...  
Keyword(s):  
Pulsed Laser Deposition ◽  
Leakage Current ◽  
Pulsed Laser ◽  
Laser Deposition

Reduced leakage current in Al2O3/TiO2/Al2O3 dielectric stacks grown by pulsed laser deposition

2020 ◽  
Author(s):  
P. S. Padhi ◽  
R. S. Ajimsha ◽  
S. K. Chetia ◽  
Amit K. Das ◽  
Vikas K. Sahu ◽  
...  
Keyword(s):  
Pulsed Laser Deposition ◽  
Leakage Current ◽  
Pulsed Laser ◽  
Laser Deposition
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