Influence of exciting frequency on gas and ion rotational temperatures of nitrogen capacitively coupled plasma

2008 ◽  
Vol 15 (7) ◽  
pp. 073501 ◽  
Author(s):  
X. J. Huang ◽  
Y. Xin ◽  
Q. H. Yuan ◽  
Z. Y. Ning
Keyword(s):  
Capacitively Coupled ◽  
Exciting Frequency ◽  
Capacitively Coupled Plasma

Functional separation of biasing and sustaining voltages in two-frequency capacitively coupled plasma

2000 ◽  
Vol 77 (4) ◽  
pp. 489-491 ◽  
Author(s):  
T. Kitajima ◽  
Y. Takeo ◽  
Z. Lj. Petrović ◽  
T. Makabe
Keyword(s):  
Capacitively Coupled ◽  
Capacitively Coupled Plasma

scholarly journals Modeling of Perpendicularly Driven Dual-Frequency Capacitively Coupled Plasma

2016 ◽  
Vol 18 (2) ◽  
pp. 143-146
Author(s):  
Hongyu Wang ◽  
Wei Jiang ◽  
Peng Sun ◽  
Shuangyun Zhao ◽  
Yang Li
Keyword(s):  
Dual Frequency ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma
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