Direct coupling of pulsed radio frequency and pulsed high power in novel pulsed power system for plasma immersion ion implantation

Chunzhi Gong; Xiubo Tian; Shiqin Yang; Ricky K. Y. Fu; Paul K. Chu

doi:10.1063/1.2906220

Direct coupling of pulsed radio frequency and pulsed high power in novel pulsed power system for plasma immersion ion implantation

Review of Scientific Instruments ◽

10.1063/1.2906220 ◽

2008 ◽

Vol 79 (4) ◽

pp. 043501 ◽

Cited By ~ 2

Author(s):

Chunzhi Gong ◽

Xiubo Tian ◽

Shiqin Yang ◽

Ricky K. Y. Fu ◽

Paul K. Chu

Keyword(s):

Ion Implantation ◽

Power System ◽

Radio Frequency ◽

High Power ◽

Pulsed Power ◽

Direct Coupling ◽

Plasma Immersion Ion Implantation

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An All Solid-State Pulsed Power Generator for Plasma Immersion Ion Implantation (PIII)

Plasma Science and Technology ◽

10.1088/1009-0630/11/2/17 ◽

2009 ◽

Vol 11 (2) ◽

pp. 220-224 ◽

Cited By ~ 1

Author(s):

Liu Kefu ◽

Qiu Jian ◽

Wu Yifan

Keyword(s):

Solid State ◽

Ion Implantation ◽

Pulsed Power ◽

Power Generator ◽

Plasma Immersion Ion Implantation ◽

Pulsed Power Generator

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Plasma immersion ion implantation into cylindrical bore using internal inductively-coupled radio-frequency discharge

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2012.05.118 ◽

2012 ◽

Vol 206 (24) ◽

pp. 5042-5045 ◽

Cited By ~ 4

Author(s):

Z.J. Wang ◽

X.B. Tian ◽

C.Z. Gong ◽

J.W. Shi ◽

S.Q. Yang ◽

...

Keyword(s):

Ion Implantation ◽

Radio Frequency ◽

Inductively Coupled ◽

Cylindrical Bore ◽

Plasma Immersion Ion Implantation ◽

Radio Frequency Discharge

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Plasma immersion ion implantation of cylindrical bore using self-excited radio-frequency glow discharge

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2010.02.039 ◽

2010 ◽

Vol 204 (18-19) ◽

pp. 2996-2998 ◽

Cited By ~ 4

Author(s):

C.Z. Gong ◽

Z.T. Zhu ◽

J.W. Shi ◽

S.Q. Yang ◽

X.B. Tian ◽

...

Keyword(s):

Glow Discharge ◽

Ion Implantation ◽

Radio Frequency ◽

Radio Frequency Glow Discharge ◽

Cylindrical Bore ◽

Plasma Immersion Ion Implantation

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COMSED 2 - recent advances to an explosively driven high power microwave Pulsed Power system

2011 IEEE Pulsed Power Conference ◽

10.1109/ppc.2011.6191480 ◽

2011 ◽

Cited By ~ 2

Author(s):

Mohamed A. Elsayed ◽

Andreas A. Neuber ◽

John W. Walter ◽

Andrew J. Young ◽

Charlie S. Anderson ◽

...

Keyword(s):

Power System ◽

High Power ◽

Pulsed Power ◽

High Power Microwave ◽

Recent Advances ◽

Power Microwave

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A mobile, high-power, high-energy pulsed-power system

2012 IEEE International Power Modulator and High Voltage Conference (IPMHVC) ◽

10.1109/ipmhvc.2012.6518869 ◽

2012 ◽

Cited By ~ 2

Author(s):

B. M. Novac ◽

M. Parker ◽

I. R. Smith ◽

P. Senior ◽

G. Louverdis

Keyword(s):

Power System ◽

High Power ◽

High Energy ◽

Pulsed Power

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Plasma immersion ion implantation using plasmas generated by radio frequency techniques

Applied Physics Letters ◽

10.1063/1.100299 ◽

1988 ◽

Vol 53 (22) ◽

pp. 2143-2145 ◽

Cited By ~ 196

Author(s):

J. Tendys ◽

I. J. Donnelly ◽

M. J. Kenny ◽

J. T. A. Pollock

Keyword(s):

Ion Implantation ◽

Radio Frequency ◽

Plasma Immersion Ion Implantation

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Microstructure and mechanical properties of CrN films fabricated by high power pulsed magnetron discharge plasma immersion ion implantation and deposition

Applied Surface Science ◽

10.1016/j.apsusc.2011.08.039 ◽

2011 ◽

Vol 258 (1) ◽

pp. 242-246 ◽

Cited By ~ 15

Author(s):

Zhongzhen Wu ◽

Xiubo Tian ◽

Zeming Wang ◽

Chunzhi Gong ◽

Shiqin Yang ◽

...

Keyword(s):

Mechanical Properties ◽

Ion Implantation ◽

High Power ◽

Discharge Plasma ◽

Magnetron Discharge ◽

Microstructure And Mechanical Properties ◽

Plasma Immersion Ion Implantation ◽

Pulsed Magnetron

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Graded nanostructured interfacial layers fabricated by high power pulsed magnetron sputtering — plasma immersion ion implantation and deposition (HPPMS–PIII&D)

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2013.10.007 ◽

2013 ◽

Vol 236 ◽

pp. 320-325 ◽

Cited By ~ 4

Author(s):

Zhongzhen Wu ◽

Xiubo Tian ◽

Yongqiang Wei ◽

Chunzhi Gong ◽

Shiqin Yang ◽

...

Keyword(s):

Ion Implantation ◽

Magnetron Sputtering ◽

High Power ◽

Interfacial Layers ◽

Plasma Immersion Ion Implantation ◽

Pulsed Magnetron

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Pulsed power modulators for surface treatment by plasma immersion ion implantation

Brazilian Journal of Physics ◽

10.1590/s0103-97332004000800011 ◽

2004 ◽

Vol 34 (4b) ◽

pp. 1565-1571 ◽

Cited By ~ 9

Author(s):

J. O. Rossi ◽

M. Ueda ◽

J. J. Barroso

Keyword(s):

Ion Implantation ◽

Surface Treatment ◽

Pulsed Power ◽

Plasma Immersion Ion Implantation

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Effects of magnetic field on pulse wave forms in plasma immersion ion implantation in a radio-frequency, inductively coupled plasma

Journal of Applied Physics ◽

10.1063/1.1499983 ◽

2002 ◽

Vol 92 (5) ◽

pp. 2284-2289 ◽

Cited By ~ 6

Author(s):

Honghui Tong ◽

Ricky K. Y. Fu ◽

Deli Tang ◽

Xuchu Zeng ◽

Paul K. Chu

Keyword(s):

Magnetic Field ◽

Ion Implantation ◽

Radio Frequency ◽

Inductively Coupled Plasma ◽

Pulse Wave ◽

Inductively Coupled ◽

Wave Forms ◽

Plasma Immersion Ion Implantation

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