Plasma immersion ion implantation using plasmas generated by radio frequency techniques

J. Tendys; I. J. Donnelly; M. J. Kenny; J. T. A. Pollock

doi:10.1063/1.100299

Plasma immersion ion implantation using plasmas generated by radio frequency techniques

Applied Physics Letters ◽

10.1063/1.100299 ◽

1988 ◽

Vol 53 (22) ◽

pp. 2143-2145 ◽

Cited By ~ 196

Author(s):

J. Tendys ◽

I. J. Donnelly ◽

M. J. Kenny ◽

J. T. A. Pollock

Keyword(s):

Ion Implantation ◽

Radio Frequency ◽

Plasma Immersion Ion Implantation

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Plasma immersion ion implantation into cylindrical bore using internal inductively-coupled radio-frequency discharge

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2012.05.118 ◽

2012 ◽

Vol 206 (24) ◽

pp. 5042-5045 ◽

Cited By ~ 4

Author(s):

Z.J. Wang ◽

X.B. Tian ◽

C.Z. Gong ◽

J.W. Shi ◽

S.Q. Yang ◽

...

Keyword(s):

Ion Implantation ◽

Radio Frequency ◽

Inductively Coupled ◽

Cylindrical Bore ◽

Plasma Immersion Ion Implantation ◽

Radio Frequency Discharge

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Plasma immersion ion implantation of cylindrical bore using self-excited radio-frequency glow discharge

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2010.02.039 ◽

2010 ◽

Vol 204 (18-19) ◽

pp. 2996-2998 ◽

Cited By ~ 4

Author(s):

C.Z. Gong ◽

Z.T. Zhu ◽

J.W. Shi ◽

S.Q. Yang ◽

X.B. Tian ◽

...

Keyword(s):

Glow Discharge ◽

Ion Implantation ◽

Radio Frequency ◽

Radio Frequency Glow Discharge ◽

Cylindrical Bore ◽

Plasma Immersion Ion Implantation

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Direct coupling of pulsed radio frequency and pulsed high power in novel pulsed power system for plasma immersion ion implantation

Review of Scientific Instruments ◽

10.1063/1.2906220 ◽

2008 ◽

Vol 79 (4) ◽

pp. 043501 ◽

Cited By ~ 2

Author(s):

Chunzhi Gong ◽

Xiubo Tian ◽

Shiqin Yang ◽

Ricky K. Y. Fu ◽

Paul K. Chu

Keyword(s):

Ion Implantation ◽

Power System ◽

Radio Frequency ◽

High Power ◽

Pulsed Power ◽

Direct Coupling ◽

Plasma Immersion Ion Implantation

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Effects of magnetic field on pulse wave forms in plasma immersion ion implantation in a radio-frequency, inductively coupled plasma

Journal of Applied Physics ◽

10.1063/1.1499983 ◽

2002 ◽

Vol 92 (5) ◽

pp. 2284-2289 ◽

Cited By ~ 6

Author(s):

Honghui Tong ◽

Ricky K. Y. Fu ◽

Deli Tang ◽

Xuchu Zeng ◽

Paul K. Chu

Keyword(s):

Magnetic Field ◽

Ion Implantation ◽

Radio Frequency ◽

Inductively Coupled Plasma ◽

Pulse Wave ◽

Inductively Coupled ◽

Wave Forms ◽

Plasma Immersion Ion Implantation

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Surface modification by nitrogen plasma immersion ion implantation into new steel 460Li–21Cr in a capacitively coupled radio frequency discharge

Applied Surface Science ◽

10.1016/j.apsusc.2014.07.176 ◽

2014 ◽

Vol 316 ◽

pp. 72-77 ◽

Cited By ~ 6

Author(s):

H. Bhuyan ◽

S. Mändl ◽

B. Bora ◽

M. Favre ◽

E. Wyndham ◽

...

Keyword(s):

Surface Modification ◽

Ion Implantation ◽

Radio Frequency ◽

Nitrogen Plasma ◽

Capacitively Coupled ◽

Plasma Immersion Ion Implantation ◽

Radio Frequency Discharge

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Radio-frequency plasma nitriding and nitrogen plasma immersion ion implantation of Ti-6A1-4V alloy

Surface and Coatings Technology ◽

10.1016/s0257-8972(97)00066-2 ◽

1997 ◽

Vol 93 (2-3) ◽

pp. 309-313 ◽

Cited By ~ 44

Author(s):

S.Y. Wang ◽

P.K. Chu ◽

B.Y. Tang ◽

X.C. Zeng ◽

Y.B. Chen ◽

...

Keyword(s):

Ion Implantation ◽

Radio Frequency ◽

Plasma Nitriding ◽

Nitrogen Plasma ◽

Radio Frequency Plasma ◽

Frequency Plasma ◽

Plasma Immersion Ion Implantation

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Plasma immersion ion implantation into cylindrical bore using internal inductively-coupled radio-frequency discharge

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2010.08.110 ◽

2010 ◽

Author(s):

Z.J. Wang ◽

X.B. Tian ◽

C.Z. Gong ◽

J.W. Shi ◽

S.Q. Yang ◽

...

Keyword(s):

Ion Implantation ◽

Radio Frequency ◽

Inductively Coupled ◽

Cylindrical Bore ◽

Plasma Immersion Ion Implantation ◽

Radio Frequency Discharge

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Enhancement of implantation efficiency by grid biasing in radio-frequency inductively coupled plasma direct-current plasma immersion ion implantation

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.1494064 ◽

2002 ◽

Vol 20 (4) ◽

pp. 1452 ◽

Cited By ~ 5

Author(s):

Honghui Tong ◽

Ricky K. Y. Fu ◽

Xuchu Zeng ◽

Dixon T. K. Kwok ◽

Paul K. Chu

Keyword(s):

Ion Implantation ◽

Radio Frequency ◽

Direct Current ◽

Inductively Coupled Plasma ◽

Inductively Coupled ◽

Direct Current Plasma ◽

Plasma Immersion Ion Implantation

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Improved planar radio frequency inductively coupled plasma configuration in plasma immersion ion implantation

Review of Scientific Instruments ◽

10.1063/1.1568559 ◽

2003 ◽

Vol 74 (5) ◽

pp. 2704-2708 ◽

Cited By ~ 12

Author(s):

D. L. Tang ◽

R. K. Y. Fu ◽

X. B. Tian ◽

P. K. Chu

Keyword(s):

Ion Implantation ◽

Radio Frequency ◽

Inductively Coupled Plasma ◽

Inductively Coupled ◽

Plasma Immersion Ion Implantation ◽

Plasma Configuration

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Nitridation of steel 460LI-21Cr by plasma immersion ion implantation in capacitively couple radio frequency plasma

2012 Abstracts IEEE International Conference on Plasma Science ◽

10.1109/plasma.2012.6383477 ◽

2012 ◽

Author(s):

H. Bhuyan ◽

B. Bora ◽

M. Favre ◽

E. Wyndham ◽

H. Chuaqui

Keyword(s):

Ion Implantation ◽

Radio Frequency ◽

Radio Frequency Plasma ◽

Frequency Plasma ◽

Plasma Immersion Ion Implantation

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