DUHOCAMIS: A dual hollow cathode ion source for metal ion beams

2008 ◽  
Vol 79 (2) ◽  
pp. 02B315 ◽  
Author(s):  
W. J. Zhao ◽  
M. W. O. Müller ◽  
J. Janik ◽  
K. X. Liu ◽  
X. T. Ren
Keyword(s):  
Hollow Cathode ◽  
Metal Ion ◽  
Ion Beams ◽  
Ion Source

Focussed Ion Beams from Liquid Metal Ion Sources Theory and Applications

1985 ◽  
Vol 45 ◽  
Author(s):  
David R Kingham ◽  
Vincent J Mifsud
Keyword(s):  
Liquid Metal ◽  
Metal Ion ◽  
Ion Beam ◽  
Ion Beams ◽  
Ion Source ◽  
Physical Reason ◽  
Probe Size ◽  
Focussed Ion Beam ◽  
Source Current ◽  
Manufacturing Techniques

ABSTRACTA theoretical model of liquid metal ion source (LMIS) operation has been developed by Kingham and Swanson. In this paper we consider beams from LMIS on the basis of this model. In particular we consider properties such as angular intensity, energy spread and relative abundance of differently charged species of the ion beam, and the dependence of these properties on source current and elemental composition. The conclusion is that the brightest focussed beam for a given probe size is attainable at the lowest possible source current as previously stated by Swanson. LMIS sources have an onset current of typically 1-2[A and will not operate stably below this current, thus limiting the maximum focussed ion beam brightness. The physical reason for this is discussed. The relevance of these properties to fine focussed ion beam applications, particularly semiconductor processing, is discussed. Useful, and in some cases unique, device manufacturing techniques can be postulated using one or more of the momentum, energy or atomic addition properties inherant tothis type of system. Advanced research tools are discussed, together with some examples of the use of microfocussed ion beams with probe sizes down to less than 50nm. Immediate applications include: high resolution ion imaging and SIMS microanalysis; ion beam machining and microfabrication; ion beam resist exposure and ion beam mask repair.

Ion species measurement of high current metal ion beams extracted from a multicusp ion source

1992 ◽  
Vol 63 (4) ◽  
pp. 2481-2483 ◽  
Author(s):  
Yasuhiro Matsuda ◽  
Hiroshi Inami ◽  
Takatoshi Yamashita ◽  
Shuichi Fujiwara ◽  
Yutaka Inouchi ◽  
...  
Keyword(s):  
Metal Ion ◽  
Ion Beams ◽  
Ion Source ◽  
High Current ◽  
Multicusp Ion Source ◽  
Ion Species

scholarly journals Production of metal ion beams from DECRIS-3 ion source

2021 ◽  
Author(s):  
Andrey Bondarchenko ◽  
Sergey Bogomolov ◽  
Vladimir Loginov ◽  
Alexander Lebedev ◽  
Vladimir Mironov ◽  
...  
Keyword(s):  
Metal Ion ◽  
Ion Beams ◽  
Ion Source

A vacuum spark ion source: High charge state metal ion beams

2016 ◽  
Vol 87 (2) ◽  
pp. 02A905 ◽  
Author(s):  
G. Yu. Yushkov ◽  
A. G. Nikolaev ◽  
E. M. Oks ◽  
V. P. Frolova
Keyword(s):  
Charge State ◽  
Metal Ion ◽  
Ion Beams ◽  
Ion Source ◽  
High Charge State ◽  
High Charge ◽  
Vacuum Spark

Profiles of ion beams extracted from impregnated-electrode-type liquid-metal ion source with linear array emission points

Vacuum ◽  
1993 ◽  
Vol 44 (3-4) ◽  
pp. 357-360 ◽  
Author(s):  
J Ishikawa ◽  
Y Gotoh ◽  
N Fukayama ◽  
Y Ogata ◽  
K Yoshida ◽  
...  
Keyword(s):  
Liquid Metal ◽  
Metal Ion ◽  
Linear Array ◽  
Ion Beams ◽  
Ion Source

Production of low energy, high intensity metal ion beams by means of a laser ion source

2002 ◽  
Vol 73 (2) ◽  
pp. 650-653 ◽  
Author(s):  
S. Gammino ◽  
L. Torrisi ◽  
L. Andò ◽  
G. Ciavola ◽  
L. Celona ◽  
...  
Keyword(s):  
High Intensity ◽  
Metal Ion ◽  
Ion Beams ◽  
Ion Source ◽  
Low Energy ◽  
Laser Ion Source

scholarly journals A self-sputtering ion source: A new approach to quiescent metal ion beams

2010 ◽  
Vol 81 (2) ◽  
pp. 02B306 ◽  
Author(s):  
Efim Oks ◽  
André Anders
Keyword(s):  
Metal Ion ◽  
Ion Beams ◽  
Ion Source ◽  
New Approach
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