A new emissive-probe method for electron temperature measurement in radio-frequency plasmas

2007 ◽  
Vol 78 (12) ◽  
pp. 123503 ◽  
Author(s):  
Kouta Kusaba ◽  
Haruo Shindo
2012 ◽  
Vol 52 (8) ◽  
pp. 692-698 ◽  
Author(s):  
J. Wild ◽  
P. Kudrna ◽  
M. Tichý ◽  
V. Nevrlý ◽  
M. Střižík ◽  
...  

2016 ◽  
Vol 18 (11) ◽  
pp. 1089-1094 ◽  
Author(s):  
Satoshi Nodomi ◽  
Shuichi Sato ◽  
Mikio Ohuchi

Author(s):  
Tomoyuki Murakami ◽  
Tetsuya Suekane ◽  
Kiyoshi Tsuji ◽  
Yoshihiro Okuno ◽  
Yasuo Hasegawa ◽  
...  

2018 ◽  
Vol 16 (6) ◽  
pp. 385-390
Author(s):  
Shikha BINWAL ◽  
Jay K JOSHI ◽  
Shantanu Kumar KARKARI ◽  
Predhiman Krishan KAW ◽  
Lekha NAIR ◽  
...  

A floating emissive probe has been used to obtain the spatial electron temperature (Te) profile in a 13.56 MHz parallel plate capacitive coupled plasma. The effect of an external transverse magnetic field and pressure on the electron temperature profile has been discussed. In the un-magnetised case, the bulk region of the plasma has a uniform Te. Upon application of the magnetic field, the Te profile becomes non-uniform and skewed.  With increase in pressure, there is an overall reduction in electron temperature. The regions adjacent to the electrodes witnessed a higher temperature than the bulk for both cases. The emissive probe results have also been compared with particle-in-cell simulation results for the un-magnetised case.


Sign in / Sign up

Export Citation Format

Share Document