scholarly journals Validity of Electron Temperature Measurement by Using Boltzmann Plot Method in Radio Frequency Inductive Discharge in the Atmospheric Pressure Range

2006 ◽  
Vol 1 ◽  
pp. 028-028 ◽  
Author(s):  
Noriyasu OHNO ◽  
M. Abdur RAZZAK ◽  
Hiroshi UKAI ◽  
Shuichi TAKAMURA ◽  
Yoshihiko UESUGI
Keyword(s):  
Radio Frequency ◽  
Electron Temperature ◽  
Temperature Measurement ◽  
Atmospheric Pressure ◽  
Pressure Range ◽  
Boltzmann Plot ◽  
Inductive Discharge

Influence of external parameters on RF inductive discharge plasma characteristics

2021 ◽  
Author(s):  
Elena Alexandrovna Kralkina ◽  
Polina Nekliudova ◽  
Aleksandr Nikonov ◽  
Konstantine Vavilin ◽  
Ilia ZADIRIEV ◽  
...  
Keyword(s):  
Electron Temperature ◽  
Electron Density ◽  
Pressure Range ◽  
Discharge Plasma ◽  
Experimental Studies ◽  
Power Input ◽  
Skin Layer ◽  
Capacitive Coupling ◽  
Rf Power ◽  
Inductive Discharge

Abstract Systematic experimental studies of the electron density and temperature, the efficiency of RF power coupling to the RF inductive discharge plasma have been carried out in the pressure range of helium, neon, argon, and krypton 0.1 – 133 Pa, at an RF generator power of 100 – 500 W and frequencies of 2, 4 and 13.56 MHz. It is shown that the electron density reaches a maximum, and the temperature reaches a minimum in the pressure range 1.33 – 13.3 Pa. Taking into account the presence of a parasitic capacitive coupling between the inductor and the plasma, which forms the capacitive channel of RF power input, makes it possible to conclude that the maximum values of the electron density were observed at the pressure at which the power input through the inductive channel is maximal. At pressures of the order of 0.133 Pa and below, an increase in the electron temperature is observed in the peripheral part of the discharge. Numerical modeling by the PIC method shows that one of the reasons is the formation of a directed azimuthal motion of electrons in the region of the skin layer. As the pressure increases, a transition occurs from the nonlocal to the local electron kinetics, which is reflected in the ratio between the electron temperature in the peripheral and central parts of the discharge.

scholarly journals Spectroscopic evaluation of vibrational temperature and electron density in reduced pressure radio frequency nitrogen plasma

2021 ◽  
Vol 3 (6) ◽  
Author(s):  
Hira Fatima ◽  
M. Usman Ullah ◽  
S. Ahmad ◽  
Mubashair Imran ◽  
S. Sajjad ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Electron Temperature ◽  
Electron Density ◽  
Intensity Ratio ◽  
Vibrational Temperature ◽  
Nitrogen Plasma ◽  
Radio Frequency Power ◽  
Line Ratio ◽  
Boltzmann Plot ◽  
Frequency Power

Abstract The optical emission spectroscopy technique is used to determine the vibrational temperature of the second positive band system,$$ N_{2} (C,\upsilon^{^{\prime}} - B,\upsilon^{^{\prime\prime}}$$ N 2 ( C , υ ′ - B , υ ″ ) in the wavelength range 367.1–380.5 nm by using the line-ratio and Boltzmann plot methods. The electron temperature is evaluated from the intensity ratio of the selected molecular bands corresponding to $$N_{2}^{ + } (B,\upsilon - X, \upsilon^{^{\prime}} , $$ N 2 + ( B , υ - X , υ ′ , 391.44 nm), and, $$N_{2} (C,\upsilon^{^{\prime}} - B,\upsilon^{^{\prime\prime}}$$ N 2 ( C , υ ′ - B , υ ″ , 375.4 nm) transitions, respectively. The selected bands have a different threshold of excitation energies and thus serve as a sensitive indicator of the electron energy distribution function (EEDF). The electron density has been determined from the intensity ratio of the molecular transitions corresponding to $$N_{2}^{ + } (B,\upsilon - X, \upsilon^{^{\prime}} , $$ N 2 + ( B , υ - X , υ ′ , 391.44 nm), and, $$ N_{2} (C,\upsilon^{^{\prime}} - B,\upsilon^{^{\prime\prime}}$$ N 2 ( C , υ ′ - B , υ ″ , 380.5 nm) for different levels of pressure and radio frequency power. The results show that the vibrational temperature decreases with increasing nitrogen fill pressure and radio frequency power. However, the electron temperature increases with radio frequency power and reduces with fill pressure. The electron density increases both with nitrogen fill pressure and radio frequency power that attributes to the effective collisional transfer of energy producing electron impact ionization. Plasma parameters show a significant dependence on discharge conditions and can be fine-tuned for specific surface treatments. Article Highlights Spectrum analysis of RF-driven nitrogen plasma for varying discharge conditions Evaluation of vibrational temperature using line-ratio and Boltzmann plot methods Comparison of vibrational temperatures for line-ratio and Boltzmann plot methods Evaluation of electron temperature and density using the intensity-ratio of bands Correlation of temperature and density with varying fill pressure and RF power

The driving frequency effects on the atmospheric pressure corona jet plasmas from low frequency to radio frequency

2011 ◽  
Vol 18 (4) ◽  
pp. 043503 ◽  
Author(s):  
Dan Bee Kim ◽  
H. Jung ◽  
B. Gweon ◽  
S. Y. Moon ◽  
J. K. Rhee ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Atmospheric Pressure ◽  
Low Frequency ◽  
Driving Frequency ◽  
Frequency Effects

Electron temperature measurement and performance of a nonequilibrium disk MHD generator

1997 ◽  
Vol 120 (1) ◽  
pp. 16-22 ◽  
Author(s):  
Tomoyuki Murakami ◽  
Tetsuya Suekane ◽  
Kiyoshi Tsuji ◽  
Yoshihiro Okuno ◽  
Yasuo Hasegawa ◽  
...  
Keyword(s):  
Electron Temperature ◽  
Temperature Measurement ◽  
Mhd Generator ◽  
And Performance
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