Polycrystalline silicon thin-film transistors with location-controlled crystal grains fabricated by excimer laser crystallization

2007 ◽  
Vol 91 (20) ◽  
pp. 201903 ◽  
Author(s):  
Chun-Chien Tsai ◽  
Yao-Jen Lee ◽  
Ko-Yu Chiang ◽  
Jyh-Liang Wang ◽  
I-Che Lee ◽  
...  
Keyword(s):  
Thin Film ◽  
Excimer Laser ◽  
Thin Film Transistors ◽  
Polycrystalline Silicon ◽  
Laser Crystallization ◽  
Silicon Thin Film ◽  
Excimer Laser Crystallization ◽  
Crystal Grains

Noise performances in polycrystalline silicon thin-film transistors fabricated by excimer laser crystallization

1997 ◽  
Vol 71 (5) ◽  
pp. 578-580 ◽  
Author(s):  
R. Carluccio ◽  
A. Corradetti ◽  
G. Fortunato ◽  
C. Reita ◽  
P. Legagneux ◽  
...  
Keyword(s):  
Thin Film ◽  
Excimer Laser ◽  
Thin Film Transistors ◽  
Polycrystalline Silicon ◽  
Laser Crystallization ◽  
Silicon Thin Film ◽  
Excimer Laser Crystallization

Threshold voltage of excimer-laser-annealed polycrystalline silicon thin-film transistors

2000 ◽  
Vol 76 (17) ◽  
pp. 2442-2444 ◽  
Author(s):  
C. T. Angelis ◽  
C. A. Dimitriadis ◽  
F. V. Farmakis ◽  
J. Brini ◽  
G. Kamarinos ◽  
...  
Keyword(s):  
Thin Film ◽  
Excimer Laser ◽  
Threshold Voltage ◽  
Thin Film Transistors ◽  
Polycrystalline Silicon ◽  
Silicon Thin Film

High-Performance Recessed-Channel Germanium Thin-Film Transistors via Excimer Laser Crystallization

2018 ◽  
Vol 39 (3) ◽  
pp. 367-370 ◽  
Author(s):  
Chan-Yu Liao ◽  
Shih-Hung Chen ◽  
Wen-Hsien Huang ◽  
Chang-Hong Shen ◽  
Jia-Min Shieh ◽  
...  
Keyword(s):  
Thin Film ◽  
Excimer Laser ◽  
Thin Film Transistors ◽  
High Performance ◽  
Laser Crystallization ◽  
Excimer Laser Crystallization ◽  
Recessed Channel
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