Noise performances in polycrystalline silicon thin-film transistors fabricated by excimer laser crystallization

R. Carluccio; A. Corradetti; G. Fortunato; C. Reita; P. Legagneux; F. Plais; D. Pribat

doi:10.1063/1.119799

Noise performances in polycrystalline silicon thin-film transistors fabricated by excimer laser crystallization

Applied Physics Letters ◽

10.1063/1.119799 ◽

1997 ◽

Vol 71 (5) ◽

pp. 578-580 ◽

Cited By ~ 20

Author(s):

R. Carluccio ◽

A. Corradetti ◽

G. Fortunato ◽

C. Reita ◽

P. Legagneux ◽

...

Keyword(s):

Thin Film ◽

Excimer Laser ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Laser Crystallization ◽

Silicon Thin Film ◽

Excimer Laser Crystallization

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High-Performance Polycrystalline Silicon Thin-Film Transistors with Two-Dimensional Location Control of the Grain Boundary via Excimer Laser Crystallization

Journal of Nanoscience and Nanotechnology ◽

10.1166/jnn.2012.6308 ◽

2012 ◽

Vol 12 (7) ◽

pp. 5505-5509 ◽

Cited By ~ 1

Author(s):

Chao-Lung Wang ◽

I.-Che Lee ◽

Chun-Yu Wu ◽

Chan-Yu Liao ◽

Yu-Ting Cheng ◽

...

Keyword(s):

Thin Film ◽

Grain Boundary ◽

Excimer Laser ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

High Performance ◽

Two Dimensional ◽

Laser Crystallization ◽

Silicon Thin Film ◽

Excimer Laser Crystallization

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Polycrystalline silicon thin-film transistors with location-controlled crystal grains fabricated by excimer laser crystallization

Applied Physics Letters ◽

10.1063/1.2801525 ◽

2007 ◽

Vol 91 (20) ◽

pp. 201903 ◽

Cited By ~ 7

Author(s):

Chun-Chien Tsai ◽

Yao-Jen Lee ◽

Ko-Yu Chiang ◽

Jyh-Liang Wang ◽

I-Che Lee ◽

...

Keyword(s):

Thin Film ◽

Excimer Laser ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Laser Crystallization ◽

Silicon Thin Film ◽

Excimer Laser Crystallization ◽

Crystal Grains

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High-Performance Self-Aligned Bottom-Gate Low-Temperature Poly-Silicon Thin-Film Transistors With Excimer Laser Crystallization

IEEE Electron Device Letters ◽

10.1109/led.2007.899326 ◽

2007 ◽

Vol 28 (7) ◽

pp. 599-602 ◽

Cited By ~ 24

Author(s):

Chun-Chien Tsai ◽

Hsu-Hsin Chen ◽

Bo-Ting Chen ◽

Huang-Chung Cheng

Keyword(s):

Thin Film ◽

Low Temperature ◽

Excimer Laser ◽

Thin Film Transistors ◽

High Performance ◽

Laser Crystallization ◽

Silicon Thin Film ◽

Poly Silicon ◽

Excimer Laser Crystallization ◽

Bottom Gate

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Location-Controlled Single-Crystal-Like Silicon Thin-Film Transistors by Excimer Laser Crystallization on Recessed-Channel Silicon Strip With Under-Layered Nitride

IEEE Electron Device Letters ◽

10.1109/led.2016.2588735 ◽

2016 ◽

Vol 37 (9) ◽

pp. 1135-1138 ◽

Cited By ~ 10

Author(s):

Chan-Yu Liao ◽

Hsiao-Chun Lin ◽

Chao-Lung Wang ◽

I-Che Lee ◽

Chia-Hsin Chou ◽

...

Keyword(s):

Thin Film ◽

Single Crystal ◽

Excimer Laser ◽

Thin Film Transistors ◽

Laser Crystallization ◽

Silicon Thin Film ◽

Excimer Laser Crystallization ◽

Recessed Channel

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High-Performance Polycrystalline-Silicon Nanowire Thin-Film Transistors With Location-Controlled Grain Boundary via Excimer Laser Crystallization

IEEE Electron Device Letters ◽

10.1109/led.2012.2211857 ◽

2012 ◽

Vol 33 (11) ◽

pp. 1562-1564 ◽

Cited By ~ 14

Author(s):

Chao-Lung Wang ◽

I-Che Lee ◽

Chun-Yu Wu ◽

Chia-Hsin Chou ◽

Po-Yu Yang ◽

...

Keyword(s):

Thin Film ◽

Grain Boundary ◽

Excimer Laser ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

High Performance ◽

Silicon Nanowire ◽

Laser Crystallization ◽

Excimer Laser Crystallization

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High-performance top and bottom double-gate low-temperature poly-silicon thin film transistors fabricated by excimer laser crystallization

Solid-State Electronics ◽

10.1016/j.sse.2007.10.029 ◽

2008 ◽

Vol 52 (3) ◽

pp. 365-371 ◽

Cited By ~ 37

Author(s):

Chun-Chien Tsai ◽

Yao-Jen Lee ◽

Jyh-Liang Wang ◽

Kai-Fang Wei ◽

I-Che Lee ◽

...

Keyword(s):

Thin Film ◽

Low Temperature ◽

Excimer Laser ◽

Thin Film Transistors ◽

High Performance ◽

Double Gate ◽

Laser Crystallization ◽

Silicon Thin Film ◽

Poly Silicon ◽

Excimer Laser Crystallization

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Excimer laser crystallization and doping of source and drain regions in high quality amorphous silicon thin film transistors

Applied Physics Letters ◽

10.1063/1.117128 ◽

1996 ◽

Vol 69 (25) ◽

pp. 3857-3859 ◽

Cited By ~ 5

Author(s):

E. A. Al‐Nuaimy ◽

J. M. Marshall

Keyword(s):

Thin Film ◽

Amorphous Silicon ◽

Excimer Laser ◽

Thin Film Transistors ◽

Laser Crystallization ◽

Silicon Thin Film ◽

High Quality ◽

Excimer Laser Crystallization

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Threshold voltage of excimer-laser-annealed polycrystalline silicon thin-film transistors

Applied Physics Letters ◽

10.1063/1.126370 ◽

2000 ◽

Vol 76 (17) ◽

pp. 2442-2444 ◽

Cited By ~ 15

Author(s):

C. T. Angelis ◽

C. A. Dimitriadis ◽

F. V. Farmakis ◽

J. Brini ◽

G. Kamarinos ◽

...

Keyword(s):

Thin Film ◽

Excimer Laser ◽

Threshold Voltage ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Silicon Thin Film

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High-performance polycrystalline silicon thin-film transistors prepared via the laser crystallization of the prepatterned channel layer on the bottom-gate structure

Thin Solid Films ◽

10.1016/j.tsf.2012.09.048 ◽

2013 ◽

Vol 529 ◽

pp. 421-425 ◽

Cited By ~ 4

Author(s):

Chao-Lung Wang ◽

I-Che Lee ◽

Chun-Yu Wu ◽

Yu-Ting Cheng ◽

Po-Yu Yang ◽

...

Keyword(s):

Thin Film ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

High Performance ◽

Laser Crystallization ◽

Silicon Thin Film ◽

Channel Layer ◽

Gate Structure ◽

Bottom Gate

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High-Performance Recessed-Channel Germanium Thin-Film Transistors via Excimer Laser Crystallization

IEEE Electron Device Letters ◽

10.1109/led.2018.2791506 ◽

2018 ◽

Vol 39 (3) ◽

pp. 367-370 ◽

Cited By ~ 4

Author(s):

Chan-Yu Liao ◽

Shih-Hung Chen ◽

Wen-Hsien Huang ◽

Chang-Hong Shen ◽

Jia-Min Shieh ◽

...

Keyword(s):

Thin Film ◽

Excimer Laser ◽

Thin Film Transistors ◽

High Performance ◽

Laser Crystallization ◽

Excimer Laser Crystallization ◽

Recessed Channel

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