In Situ Monitoring of Hafnium Oxide Atomic Layer Deposition

2007 ◽  
Author(s):  
J. E. Maslar ◽  
W. S. Hurst ◽  
D. R. Burgess ◽  
W. A. Kimes ◽  
N. V. Nguyen ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Hafnium Oxide ◽  
Atomic Layer ◽  
In Situ Monitoring ◽  
Layer Deposition

Optical in situ monitoring of plasma-enhanced atomic layer deposition process

2018 ◽  
Vol 57 (6S2) ◽  
pp. 06JF05 ◽  
Author(s):  
Muhammad Zeeshan Arshad ◽  
Kyung Jae Jo ◽  
Hyun Gi Kim ◽  
Sang Jeen Hong
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Deposition Process ◽  
In Situ Monitoring ◽  
Atomic Layer Deposition Process ◽  
Layer Deposition

In Situ Gas Phase Diagnostics for Hafnium Oxide Atomic Layer Deposition

2019 ◽  
Vol 13 (2) ◽  
pp. 139-149 ◽  
Author(s):  
James E. Maslar ◽  
W.S. Hurst ◽  
D.R. Burgess ◽  
William Kimes ◽  
Nhan V. Nguyen ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Gas Phase ◽  
Hafnium Oxide ◽  
Atomic Layer ◽  
Layer Deposition

Porphyrins as Templates for Site-Selective Atomic Layer Deposition: Vapor Metalation and in Situ Monitoring of Island Growth

2016 ◽  
Vol 8 (31) ◽  
pp. 19853-19859 ◽  
Author(s):  
Jason R. Avila ◽  
Jonathan D. Emery ◽  
Michael J. Pellin ◽  
Alex B. F. Martinson ◽  
Omar K. Farha ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
In Situ Monitoring ◽  
Island Growth ◽  
Layer Deposition ◽  
Site Selective

scholarly journals Atomic Layer Deposition of Hafnium Oxide on InAs: Insight from Time-Resolved in Situ Studies

2020 ◽  
Vol 2 (12) ◽  
pp. 3915-3922
Author(s):  
Giulio D’Acunto ◽  
Andrea Troian ◽  
Esko Kokkonen ◽  
Foqia Rehman ◽  
Yen-Po Liu ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Hafnium Oxide ◽  
Atomic Layer ◽  
Time Resolved ◽  
In Situ Studies ◽  
Layer Deposition
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