Barrier performance of ultrathin Ni–Ti film for integrating ferroelectric capacitors on Si
2000 ◽
Vol 42
(1-2)
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pp. 319-324
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Keyword(s):
2021 ◽
pp. 106494
1984 ◽
Vol 75
(6)
◽
pp. 1817-1826
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1998 ◽
Vol 19
(1-4)
◽
pp. 159-177
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Keyword(s):