Silicon film formation by chemical transport in atmospheric-pressure pure hydrogen plasma

2007 ◽  
Vol 102 (2) ◽  
pp. 023302 ◽  
Author(s):  
Hiromasa Ohmi ◽  
Hiroaki Kakiuchi ◽  
Yoshinori Hamaoka ◽  
Kiyoshi Yasutake
Keyword(s):  
Atmospheric Pressure ◽  
Film Formation ◽  
Hydrogen Plasma ◽  
Silicon Film ◽  
Chemical Transport ◽  
Pure Hydrogen

Purified Si film formation from metallurgical-grade Si by hydrogen plasma induced chemical transport

2009 ◽  
Vol 95 (18) ◽  
pp. 181506 ◽  
Author(s):  
Hiromasa Ohmi ◽  
Akihiro Goto ◽  
Daiki Kamada ◽  
Yoshinori Hamaoka ◽  
Hiroaki Kakiuchi ◽  
...  
Keyword(s):  
Film Formation ◽  
Hydrogen Plasma ◽  
Chemical Transport

Fabrication of high-quality amorphous silicon film from cyclopentasilane by vapor deposition between two parallel substrates

2015 ◽  
Vol 51 (21) ◽  
pp. 4417-4420 ◽  
Author(s):  
Zhongrong Shen ◽  
Takashi Masuda ◽  
Hideyuki Takagishi ◽  
Keisuke Ohdaira ◽  
Tatsuya Shimoda
Keyword(s):  
Thermal Decomposition ◽  
Amorphous Silicon ◽  
High Throughput ◽  
Vapor Deposition ◽  
Atmospheric Pressure ◽  
Cost Reduction ◽  
Film Formation ◽  
Silicon Film ◽  
High Quality ◽  
Amorphous Silicon Film

Cyclopentasilane converts into amorphous silicon film between two parallel substrates under atmospheric pressure by thermal decomposition at 350–400 °C, which combines the advantages of high throughput with cost reduction and high quality film formation.

scholarly journals Catalysts for Hydrogen Generation via Oxy–Steam Reforming of Methanol Process

Materials ◽  
2020 ◽  
Vol 13 (24) ◽  
pp. 5601
Author(s):  
Magdalena Mosińska ◽  
Małgorzata I. Szynkowska-Jóźwik ◽  
Paweł Mierczyński
Keyword(s):  
Low Temperature ◽  
Steam Reforming ◽  
Atmospheric Pressure ◽  
Hydrogen Generation ◽  
High Volume ◽  
Pure Hydrogen ◽  
Methanol Reforming ◽  
Catalytic Systems ◽  
Steam Reforming Of Methanol ◽  
Production Of Hydrogen

The production of pure hydrogen is one of the most important problems of the modern chemical industry. While high volume production of hydrogen is well under control, finding a cheap method of hydrogen production for small, mobile, or his receivers, such as fuel cells or hybrid cars, is still a problem. Potentially, a promising method for the generation of hydrogen can be oxy–steam-reforming of methanol process. It is a process that takes place at relatively low temperature and atmospheric pressure, which makes it possible to generate hydrogen directly where it is needed. It is a process that takes place at relatively low temperature and atmospheric pressure, which makes it possible to generate hydrogen directly where it is needed. This paper summarizes the current state of knowledge on the catalysts used for the production of hydrogen in the process of the oxy–steam-reforming of methanol (OSRM). The development of innovative energy generation technologies has intensified research related to the design of new catalysts that can be used in methanol-reforming reactions. This review shows the different pathways of the methanol-reforming reaction. The paper presents a comparison of commonly used copper-based catalysts with other catalytic systems for the production of H2 via OSRM reaction. The surface mechanism of the oxy–steam-reforming of methanol and the kinetic model of the OSRM process are discussed.

scholarly journals Synthesis of Multiwalled Carbon Nanotubes on Stainless Steel by Atmospheric Pressure Microwave Plasma Chemical Vapor Deposition

2020 ◽  
Vol 10 (13) ◽  
pp. 4468 ◽  
Author(s):  
Dashuai Li ◽  
Ling Tong ◽  
Bo Gao
Keyword(s):  
Carbon Nanotubes ◽  
Stainless Steel ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Atmospheric Pressure ◽  
Microwave Plasma ◽  
Hydrogen Plasma ◽  
Chemical Vapor ◽  
Plasma Chemical ◽  
Plasma Chemical Vapor Deposition

In this paper, we synthesize carbon nanotubes (CNTs) by using atmospheric pressure microwave plasma chemical vapor deposition (AMPCVD). In AMPCVD, a coaxial plasma generator provides 200 W 2.45 GHz microwave plasma at atmospheric pressure to decompose the precursor. A high-temperature tube furnace provides a suitable growth temperature for the deposition of CNTs. Optical fiber spectroscopy was used to measure the compositions of the argon–ethanol–hydrogen plasma. A comparative experiment of ethanol precursor decomposition, with and without plasma, was carried out to measure the role of the microwave plasma, showing that the 200 W microwave plasma can decompose 99% of ethanol precursor at any furnace temperature. CNTs were prepared on a stainless steel substrate by using the technology to decompose ethanol with the plasma power of 200 W at the temperatures of 500, 600, 700, and 800 °C; CNT growth increases with the increase in temperature. Prepared CNTs, analyzed by SEM and HRTEM, were shown to be multiwalled and tangled with each other. The measurement of XPS and Raman spectroscopy indicates that many oxygenated functional groups have attached to the surface of the CNTs.

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