Characterization of 45° Micromirrors Fabricated by Silicon Anisotropic Etching in Solutions Containing Different Organic Additives
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2007 ◽
Vol 124-126
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pp. 355-358
2011 ◽
Vol 233-235
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pp. 1790-1793
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1988 ◽
Vol 61
(4)
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pp. 658-668
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