Role of the internal strain on the incomplete Si∕SiO2 phase separation in substoichiometric silicon oxide films

2007 ◽  
Vol 90 (18) ◽  
pp. 183101 ◽  
Author(s):  
A. La Magna ◽  
G. Nicotra ◽  
C. Bongiorno ◽  
C. Spinella ◽  
M. G. Grimaldi ◽  
...  
2009 ◽  
Vol 159-160 ◽  
pp. 80-82 ◽  
Author(s):  
G. Nicotra ◽  
C. Spinella ◽  
A. La Magna ◽  
C. Bongiorno ◽  
E. Rimini

1993 ◽  
Vol 69 (1-4) ◽  
pp. 281-284
Author(s):  
D. Fernández ◽  
P. González ◽  
J. Pou ◽  
E. García ◽  
J. Serra ◽  
...  

Author(s):  
Peter P. Murmu ◽  
Akhil Shettigar ◽  
Shen V. Chong ◽  
Zihang Liu ◽  
Dana Goodacre ◽  
...  

2021 ◽  
Vol 271 ◽  
pp. 115248
Author(s):  
Icíar Arnay ◽  
Jesús López-Sánchez ◽  
Eduardo Salas-Colera ◽  
Federico Mompeán ◽  
Adolfo del Campo ◽  
...  
Keyword(s):  

Sign in / Sign up

Export Citation Format

Share Document