Effect of Mass Damping and Stiffness Damping in Micromachined Air Coupled Capacitance Transducer
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2001 ◽
Vol 12
(8)
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pp. 1076-1082
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1989 ◽
Vol 60
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pp. 2789-2793
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Vol 21
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pp. 1208-1211
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1988 ◽
Vol 37
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pp. 368-373
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2006 ◽
Vol 125
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pp. 329-334
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