Effect of Mass Damping and Stiffness Damping in Micromachined Air Coupled Capacitance Transducer

2007 ◽  
Author(s):  
Manoj Kumar K. M. ◽  
Shivappa Goravar ◽  
Vamshi Kommareddy ◽  
Ying Fan ◽  
James Barshinger ◽  
...  
2004 ◽  
Vol 21 (7) ◽  
pp. 1208-1211 ◽  
Author(s):  
Zhou Ze-Bing ◽  
Dong Ying-Jie ◽  
Tian Yu-Long ◽  
Qin Dan ◽  
Luo Jun

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