Fundamentals and applications of a plasma-processing system based on electron-beam ionization
1989 ◽
Vol 28
(Part 2, No. 5)
◽
pp. L868-L870
◽
1979 ◽
Vol 26
(4)
◽
pp. 675-685
◽
Keyword(s):
1993 ◽
Vol 11
(5)
◽
pp. 1906
2015 ◽
Vol 24
(4)
◽
pp. 102-110
◽