The dependence of donor-acceptor pair (DAP) emission properties on impurity
concentrations of N and B in 6H-SiC epilayers was investigated. Doped samples were grown by
closed sublimation technique, and impurity concentrations were confirmed by secondary ion mass
spectrometry (SIMS). Photoluminescence (PL) measurement results indicate that p-type 6H-SiC with
NA>ND had extremely low DAP emission efficiency, whereas n-type 6H-SiC with NA<ND showed
intense DAP emission. Moreover, n-type 6H-SiC with high N and B concentrations exceeding
1018cm-3 is preferable for high DAP emission efficiency.