11–13GHz electron cyclotron resonance plasma source using cylindrically comb-shaped magnetic-field configuration for broad ion-beam processing

2006 ◽  
Vol 77 (11) ◽  
pp. 113503 ◽  
Author(s):  
Toyohisa Asaji ◽  
Yushi Kato ◽  
Fuminobu Sato ◽  
Toshiyuki Iida ◽  
Junji Saito
Keyword(s):  
Magnetic Field ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Ion Beam ◽  
Plasma Source ◽  
Field Configuration ◽  
Electron Cyclotron ◽  
Magnetic Field Configuration ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma

Compact Electron Cyclotron Resonance Plasma Source Optimization for Ion Beam Applications

1997 ◽  
Vol 36 (Part 1, No. 7B) ◽  
pp. 4576-4582 ◽  
Author(s):  
Patrick O'Keeffe ◽  
Kouji Yamakawa ◽  
Harunobu Mutoh ◽  
Shoji Den ◽  
Yuzo Hayashi
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Ion Beam ◽  
Plasma Source ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma

Enhancement of Ar8+Ion Beam Intensity from RIKEN 18 GHz Electron Cyclotron Resonance Ion Source by Optimizing the Magnetic Field Configuration

2003 ◽  
Vol 42 (Part 1, No. 6A) ◽  
pp. 3656-3657 ◽  
Author(s):  
Yoshihide Higurashi ◽  
Takahide Nakagawa ◽  
Masanori Kidera ◽  
Toshimitsu Aihara ◽  
Masayuki Kase ◽  
...  
Keyword(s):  
Magnetic Field ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Ion Beam ◽  
Field Configuration ◽  
Ion Source ◽  
Electron Cyclotron ◽  
Beam Intensity ◽  
Magnetic Field Configuration ◽  
The Magnetic Field
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