Design and characterization of 2.45 GHz electron cyclotron resonance plasma source with magnetron magnetic field configuration for high flux of hyperthermal neutral beam

Seong Bong Kim; Dae Chul Kim; Won Namkung; Moohyun Cho; Suk Jae Yoo

doi:10.1063/1.3477998

Design and characterization of 2.45 GHz electron cyclotron resonance plasma source with magnetron magnetic field configuration for high flux of hyperthermal neutral beam

Review of Scientific Instruments ◽

10.1063/1.3477998 ◽

2010 ◽

Vol 81 (8) ◽

pp. 083301 ◽

Cited By ~ 2

Author(s):

Seong Bong Kim ◽

Dae Chul Kim ◽

Won Namkung ◽

Moohyun Cho ◽

Suk Jae Yoo

Keyword(s):

Magnetic Field ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Plasma Source ◽

Field Configuration ◽

Neutral Beam ◽

High Flux ◽

Magnetic Field Configuration ◽

Resonance Plasma

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11–13GHz electron cyclotron resonance plasma source using cylindrically comb-shaped magnetic-field configuration for broad ion-beam processing

Review of Scientific Instruments ◽

10.1063/1.2387885 ◽

2006 ◽

Vol 77 (11) ◽

pp. 113503 ◽

Cited By ~ 13

Author(s):

Toyohisa Asaji ◽

Yushi Kato ◽

Fuminobu Sato ◽

Toshiyuki Iida ◽

Junji Saito

Keyword(s):

Magnetic Field ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Ion Beam ◽

Plasma Source ◽

Field Configuration ◽

Electron Cyclotron ◽

Magnetic Field Configuration ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

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Plasma potential measurement in 2.45GHz electron cyclotron resonance plasma with a magnetron magnetic field configuration

Thin Solid Films ◽

10.1016/j.tsf.2010.03.153 ◽

2010 ◽

Vol 518 (22) ◽

pp. 6690-6693

Author(s):

Seong Bong Kim ◽

Won Namkung ◽

Moohyun Cho ◽

Dae Chul Kim ◽

Suk Jae Yoo

Keyword(s):

Magnetic Field ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Plasma Potential ◽

Field Configuration ◽

Electron Cyclotron ◽

Magnetic Field Configuration ◽

Electron Cyclotron Resonance Plasma ◽

Potential Measurement ◽

Resonance Plasma

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Characterization of He-induced Bubble Formation in Tungsten due to Exposure from an Electron Cyclotron Resonance Plasma Source

Fusion Science & Technology ◽

10.1080/15361055.2017.1333856 ◽

2017 ◽

pp. 1-10 ◽

Cited By ~ 2

Author(s):

D. Donovan ◽

D. Buchenauer ◽

J. Whaley ◽

G. Wright ◽

C.M. Parish ◽

...

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Bubble Formation ◽

Plasma Source ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

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Inclined slot-excited annular electron cyclotron resonance plasma source for hyperthermal neutral beam generation

Review of Scientific Instruments ◽

10.1063/1.3523425 ◽

2011 ◽

Vol 82 (1) ◽

pp. 013502 ◽

Cited By ~ 6

Author(s):

H.-J. You ◽

D.-W. Kim ◽

M. Koo ◽

S.-O. Jang ◽

Y.-H. Jung ◽

...

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Plasma Source ◽

Electron Cyclotron ◽

Neutral Beam ◽

Electron Cyclotron Resonance Plasma ◽

Beam Generation ◽

Resonance Plasma

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The influence of magnetic field configuration on an electron cyclotron resonance ion source

Review of Scientific Instruments ◽

10.1063/1.2812343 ◽

2008 ◽

Vol 79 (2) ◽

pp. 02A310 ◽

Cited By ~ 6

Author(s):

S. X. Peng ◽

R. Xu ◽

J. Zhao ◽

Z. X. Yuan ◽

M. Zhang ◽

...

Keyword(s):

Magnetic Field ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Field Configuration ◽

Ion Source ◽

Electron Cyclotron ◽

Magnetic Field Configuration

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Steady-state direct-current plasma immersion ion implantation using a multipolar magnetic field electron cyclotron resonance plasma source

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.1412653 ◽

2001 ◽

Vol 19 (6) ◽

pp. 2889 ◽

Cited By ~ 4

Author(s):

Xuchu Zeng ◽

Honghui Tong ◽

Ricky King-Yu Fu ◽

Paul K. Chu ◽

Zejin Xu ◽

...

Keyword(s):

Magnetic Field ◽

Steady State ◽

Ion Implantation ◽

Direct Current ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Plasma Source ◽

Direct Current Plasma ◽

Plasma Immersion Ion Implantation ◽

Resonance Plasma

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Electron cyclotron resonance plasma source in a flaring magnetic field

Plasma Sources Science and Technology ◽

10.1088/0963-0252/3/2/001 ◽

1994 ◽

Vol 3 (2) ◽

pp. 123-127 ◽

Cited By ~ 2

Author(s):

X Caron ◽

R L Meyer ◽

C Meis

Keyword(s):

Magnetic Field ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Plasma Source ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

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Characterization of a high-density electron-cyclotron resonance plasma source operating in nitrogen

Review of Scientific Instruments ◽

10.1063/1.1578154 ◽

2003 ◽

Vol 74 (7) ◽

pp. 3279-3283 ◽

Cited By ~ 5

Author(s):

E. I. Toader ◽

A. Fredriksen ◽

A. Aanesland

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Plasma Source ◽

Electron Cyclotron ◽

High Density ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

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Effect of magnetic-field configuration on the beam intensity from electron cyclotron resonance ion source and RIKEN superconducting electron cyclotron resonance ion source

Review of Scientific Instruments ◽

10.1063/1.2149304 ◽

2006 ◽

Vol 77 (3) ◽

pp. 03A304 ◽

Cited By ~ 10

Author(s):

T. Nakagawa ◽

Y. Higurashi ◽

M. Kidera ◽

T. Aihara ◽

M. Kase ◽

...

Keyword(s):

Magnetic Field ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Field Configuration ◽

Ion Source ◽

Electron Cyclotron ◽

Beam Intensity ◽

Magnetic Field Configuration

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Controlling precise magnetic field configuration around electron cyclotron resonance zone for enhancing plasma parameters and beam current

Review of Scientific Instruments ◽

10.1063/1.4827424 ◽

2014 ◽

Vol 85 (2) ◽

pp. 02A937 ◽

Cited By ~ 13

Author(s):

Keisuke Yano ◽

Yosuke Kurisu ◽

Dai Nozaki ◽

Daiju Kimura ◽

Youta Imai ◽

...

Keyword(s):

Magnetic Field ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Beam Current ◽

Field Configuration ◽

Electron Cyclotron ◽

Magnetic Field Configuration ◽

Plasma Parameters ◽

Resonance Zone

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