Formation of Ru nanocrystals by plasma enhanced atomic layer deposition for nonvolatile memory applications

2006 ◽  
Vol 89 (9) ◽  
pp. 093115 ◽  
Author(s):  
Sung-Soo Yim ◽  
Moon-Sang Lee ◽  
Ki-Su Kim ◽  
Ki-Bum Kim
Keyword(s):  
Atomic Layer Deposition ◽  
Nonvolatile Memory ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Memory Applications

Comparison of Nonvolatile Memory Effects in Ni-Based Layered and Dotted Nanostructures Prepared through Atomic Layer Deposition

2011 ◽  
Vol 14 (7) ◽  
pp. J41 ◽  
Author(s):  
Jun-Young Lee ◽  
Jeong-Eun Kim ◽  
Jin-Ha Hwang ◽  
Jae-Pyoung Ahn ◽  
Byung Kook Lee ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Nonvolatile Memory ◽  
Atomic Layer ◽  
Memory Effects ◽  
Layer Deposition

scholarly journals Atomic layer deposition and tellurization of Ge–Sb film for phase-change memory applications

RSC Advances ◽  
2019 ◽  
Vol 9 (30) ◽  
pp. 17291-17298 ◽  
Author(s):  
Yewon Kim ◽  
Byeol Han ◽  
Yu-Jin Kim ◽  
Jeeyoon Shin ◽  
Seongyoon Kim ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Phase Change ◽  
Phase Change Memory ◽  
Atomic Layer ◽  
Gap Filling ◽  
Layer Deposition ◽  
Memory Applications ◽  
Change Memory

We studied the atomic layer deposition (ALD) and the tellurization of Ge–Sb films to prepare conformal crystalline Ge–Sb–Te (GST) films and to achieve void-free gap filling for emerging phase-change memory applications.

scholarly journals Atomic Layer Deposition of High-kOxides of the Group 4 Metals for Memory Applications (Adv. Eng. Mater. 4/2009)

2009 ◽  
Vol 11 (4) ◽  
pp. NA-NA
Author(s):  
Jaakko Niinistö ◽  
Kaupo Kukli ◽  
Mikko Heikkilä ◽  
Mikko Ritala ◽  
Markku Leskelä
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Group 4 ◽  
Layer Deposition ◽  
Group 4 Metals ◽  
Memory Applications

Atomic Layer Deposition of TiOx/Al2O3Bilayer Structures for Resistive Switching Memory Applications

2014 ◽  
Vol 20 (7-8-9) ◽  
pp. 282-290 ◽  
Author(s):  
Hehe Zhang ◽  
Nabeel Aslam ◽  
Marcel Reiners ◽  
Rainer Waser ◽  
Susanne Hoffmann-Eifert
Keyword(s):  
Atomic Layer Deposition ◽  
Resistive Switching ◽  
Atomic Layer ◽  
Resistive Switching Memory ◽  
Layer Deposition ◽  
Memory Applications ◽  
Switching Memory

Nonvolatile Memory Effects of NiO Layers Embedded in Al[sub 2]O[sub 3] High-k Dielectrics Using Atomic Layer Deposition

2010 ◽  
Vol 13 (6) ◽  
pp. H209 ◽  
Author(s):  
Wontae Cho ◽  
Sun Sook Lee ◽  
Taek-Mo Chung ◽  
Chang Gyoun Kim ◽  
Ki-Seok An ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Nonvolatile Memory ◽  
Atomic Layer ◽  
Memory Effects ◽  
Layer Deposition ◽  
High K
Sign in / Sign up

Export Citation Format

Share Document