Factors driving c-axis orientation and disorientation of LiNbO3 thin films deposited on TiN and indium tin oxide by electron cyclotron resonance plasma sputtering

2006 ◽  
Vol 99 (12) ◽  
pp. 124103 ◽  
Author(s):  
H. Akazawa ◽  
M. Shimada
Keyword(s):  
Thin Films ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Axis Orientation ◽  
Plasma Sputtering ◽  
Resonance Plasma

Surface Modification of Indium-tin Oxide Thin Films by Electron Cyclotron Resonance Plasma Treatment

Shinku ◽  
2003 ◽  
Vol 46 (5) ◽  
pp. 469-472
Author(s):  
Yoshiharu KAKEHI ◽  
Kazuo SATOH ◽  
Akihide KITABATAKE ◽  
Soichi OGAWA ◽  
Yoshiyuki NAKAJIMA ◽  
...  
Keyword(s):  
Thin Films ◽  
Surface Modification ◽  
Plasma Treatment ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma
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